JPRS Report, Science & Technology, Japan, Semi Technology Symposium 90
Author: Joint publications research service arlington va
Publisher:
Published: 1991
Total Pages: 221
ISBN-13:
DOWNLOAD EBOOKThe report documented selected abstracted articles presented at the SEMI technology held 22-24 Oct 90 in China, Japan, sponsored by Semiconductor Materials International. The purpose of the present report was to address both basic and applied research issues regarding science and technology in Japan with particular attention to lithography, etching technology, microelectronics and solid state physics. It is expected the innovative experimental research and design standards presented in the report will play an important role in the future economic growth in Japan.