Electron-Beam Technology in Microelectronic Fabrication
Electron-Beam Technology in Microelectronic Fabrication

Author: George Brewer

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 377

ISBN-13: 0323153410

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Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.

Electron Beam Pasteurization and Complementary Food Processing Technologies
Electron Beam Pasteurization and Complementary Food Processing Technologies

Author: Suresh Pillai

Publisher: Elsevier

Published: 2014-11-28

Total Pages: 355

ISBN-13: 1782421084

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Food safety is a constant challenge for the food industry, and food irradiation technology has developed significantly since its introduction, moving from isotope irradiation to the use of electron beam technology. Electron Beam Pasteurization and Complementary Food Processing Technologies explores the application of electron beam pasteurization in conjunction with other food processing technologies to improve the safety and quality of food. Part one provides an overview of the issues surrounding electron beam pasteurization in food processing. Part two looks at different thermal and non-thermal food processing technologies that complement irradiation. Finally, a case study section on the commercial applications of e-beam processing provides examples from industry.

Mobile Alternative Demilitarization Technologies
Mobile Alternative Demilitarization Technologies

Author: F.W. Holm

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 285

ISBN-13: 9401155267

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FRANCIS W. HOLM 7102 Meadow Lane, Chevy Chase, MD 20815 The North Atlantic Treaty Organization (NATO) sponsored an Advanced Research Workshop (ARW) in Prague, Czech Republic, on 1-2 July 1996, to collect and study information on mobile alternative and supplemental demilitarization technologies and to report these fmdings. The mobile, or transportable, technologies identified for assessment at the workshop are alternatives to incineration technology for destruction of munitions, chemical warfare agent, and associated materials and debris. Although the discussion focused on the treatment of metal parts and explosive or energetic material, requirements for decontamination of other materials were discussed. The mobile alternative technologies are grouped into three categories based on process bulk operating temperature: low (0-200 C), medium (200-600 C), and high (600- 3,500 C). Reaction types considered include hydrolysis, biodegradation, electrochemical oxidation, gas-phase high-temperature reduction, stearn reforming, gasification, sulfur reactions, solvated electron chemistry, sodium reactions, supercritical water oxidation, wet air oxidation, and plasma torch technology. These categories represent a broad spectrum of processes, some of which have been studied only in the laboratory and some of which are in commercial use for destruction of hazardous and toxic wastes. Some technologies have been developed and used for specific commercial applications; however, in all cases, research, development, test, and evaluation (RDT &E) is necessary to assure that each technology application is effective for destroying chemical warfare materiel.