Electrochemistry of Silicon and Its Oxide

Electrochemistry of Silicon and Its Oxide

Author: Xiaoge Gregory Zhang

Publisher: Springer Science & Business Media

Published: 2007-05-08

Total Pages: 525

ISBN-13: 0306479214

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It may be argued that silicon, carbon, hydrogen, oxygen, and iron are among the most important elements on our planet, because of their involvement in geological, biol- ical, and technological processes and phenomena. All of these elements have been studied exhaustively, and voluminous material is available on their properties. Included in this material are numerous accounts of their electrochemical properties, ranging from reviews to extensive monographs to encyclopedic discourses. This is certainly true for C, H, O, and Fe, but it is true to a much lesser extent for Si, except for the specific topic of semiconductor electrochemistry. Indeed, given the importance of the elect- chemical processing of silicon and the use of silicon in electrochemical devices (e. g. , sensors and photoelectrochemical cells), the lack of a comprehensive account of the electrochemistry of silicon in aqueous solution at the fundamental level is surprising and somewhat troubling. It is troubling in the sense that the non-photoelectrochemistry of silicon seems “to have fallen through the cracks,” with the result that some of the electrochemical properties of this element are not as well known as might be warranted by its importance in a modern technological society. Dr. Zhang’s book, Electrochemical Properties of Silicon and Its Oxide, will go a long way toward addressing this shortcoming. As with his earlier book on the elect- chemistry of zinc, the present book provides a comprehensive account of the elect- chemistry of silicon in aqueous solution.


Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: Elsevier

Published: 2020-04-17

Total Pages: 1028

ISBN-13: 012817787X

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors


Fundamentals of Microfabrication

Fundamentals of Microfabrication

Author: Marc J. Madou

Publisher: CRC Press

Published: 2018-10-08

Total Pages: 764

ISBN-13: 1482274000

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MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter


Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set

Author: Marc J. Madou

Publisher: CRC Press

Published: 2018-12-14

Total Pages: 1983

ISBN-13: 1482274663

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Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.


Silicon Anodization as a Structuring Technique

Silicon Anodization as a Structuring Technique

Author: Alexey Ivanov

Publisher: Springer

Published: 2017-09-10

Total Pages: 335

ISBN-13: 3658192380

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Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. ​


Manufacturing Techniques for Microfabrication and Nanotechnology

Manufacturing Techniques for Microfabrication and Nanotechnology

Author: Marc J. Madou

Publisher: CRC Press

Published: 2011-06-13

Total Pages: 672

ISBN-13: 1420055194

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Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.


MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 2000

Total Pages: 544

ISBN-13: 9780819437167

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.


Fundamentals and Applications of Microfluidics, Third Edition

Fundamentals and Applications of Microfluidics, Third Edition

Author: Nam-Trung Nguyen

Publisher: Artech House

Published: 2019-01-31

Total Pages: 567

ISBN-13: 1630813656

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Now in its Third Edition, the Artech House bestseller, Fundamentals and Applications of Microfluidics, provides engineers and students with the most complete and current coverage of this cutting-edge field. This revised and expanded edition provides updated discussions throughout and features critical new material on microfluidic power sources, sensors, cell separation, organ-on-chip and drug delivery systems, 3D culture devices, droplet-based chemical synthesis, paper-based microfluidics for point-of-care, ion concentration polarization, micro-optofluidics and micro-magnetofluidics. The book shows how to take advantage of the performance benefits of microfluidics and serves as an instant reference for state-of-the-art microfluidics technology and applications. Readers find discussions on a wide range of applications, including fluid control devices, gas and fluid measurement devices, medical testing equipment, and implantable drug pumps. Professionals get practical guidance in choosing the best fabrication and enabling technology for a specific microfluidic application, and learn how to design a microfluidic device. Moreover, engineers get simple calculations, ready-to-use data tables, and rules of thumb that help them make design decisions and determine device characteristics quickly.


Electrochemically Engineered Nanoporous Materials

Electrochemically Engineered Nanoporous Materials

Author: Dusan Losic

Publisher: Springer

Published: 2015-07-18

Total Pages: 377

ISBN-13: 3319203460

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This book provides in-depth knowledge about the fabrications, structures, properties and applications of three outstanding electrochemically engineered nanoporous materials including porous silicon, nanoporous alumina and nanotubular titania. The book integrates three major themes describing these materials. The first theme is on porous silicon reviewing the methods for preparation by electrochemical etching, properties and methods for surface functionalization relevant for biosensing applications. Biomedical applications of porous silicon are major focus, described in several chapters reviewing recent developments on bioanalysis, emerging capture probes and drug delivery. The second theme on nanoporous alumina starts with describing the concept of self-organized electrochemical process used for synthesis nanopore and nanotube structures of valve metal oxides and reviewing recent development and progress on this field. The following chapters are focused mainly on optical properties and biosensing application of nanoporous alumina providing the reader with the depth of understanding of the structure controlled optical and photonic properties and design of optical biosensing devices using different detection principles such as photoluminescence, surface plasmon resonance, reflective spectrometry, wave guiding, Raman scattering etc. The third theme is focused on nanotubular titania reviewing three key applications including photocatalysis, solar cells and drug delivery. The book represents an important resource for academics, researchers, industry professionals, post-graduate and high-level undergraduate students providing them with both an overview of the current state-of-the-art on these materials and their future developments.


Micro- and Nano-Fabrication by Metal Assisted Chemical Etching

Micro- and Nano-Fabrication by Metal Assisted Chemical Etching

Author: Lucia Romano

Publisher: MDPI

Published: 2021-01-13

Total Pages: 106

ISBN-13: 303943845X

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Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.