Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11
Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics 11

Author: Electrochemical society. Meeting

Publisher: The Electrochemical Society

Published: 2011

Total Pages: 950

ISBN-13: 1566778654

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This issue of ECS Transactions contains the peer-reviewed full length papers of the International Symposium on Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics held May 1-6, 2011 in Montreal as a part of the 219th Meeting of The Electrochemical Society. The papers address a very diverse range of topics. In addition to the deposition and characterization of the dielectrics, more specific topics addressed by the papers include applications, device characterization and reliability, interface states, interface traps, defects, transistor and gate oxide studies, and modeling.

Formation of Silicon Nitride
Formation of Silicon Nitride

Author: Raymond C. Sangster

Publisher: Trans Tech Publications Ltd

Published: 2005-06-01

Total Pages: 960

ISBN-13: 3038130427

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The elements: Si, N, O, C and H, have strong chemical affinities for one another. Under the correct conditions, Si-N bonding will occur in almost any Si-N-(O/C/H), and many related, reaction systems; although Si-O and Si-C are formidable competitors to Si-N. The most favored Si-N compound is stoichiometric Si3N4. It comes in three common varieties. How they interrelate, how one finds them and (above all ) how one makes them - and how sometimes they just happen to form - are the subjects of this book, with due attention being paid to closely related matters.

Formation of Silicon Nitride from the 19th to the 21st Century
Formation of Silicon Nitride from the 19th to the 21st Century

Author: Raymond C. Sangster

Publisher: Trans Tech Publications

Published: 2005

Total Pages: 968

ISBN-13:

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This comprehensive reference gathers information published on the chemistry of silicon nitride and its products, uses, and markets. Separate chapters overview the manufacture of silicon nitride powder, the production of silicon nitride ceramics via the reaction bonding process, the intrinsic reactions between crystalline silicon surfaces and N2 for silicon wafers, nitridation of Si-O based materials, and chemical vapor deposition of Si-H compounds. The author, who originally worked on a similar book for the Gmelin Institute, cites 4,000-plus source documents and points the researcher to relevant handbooks, papers, and review articles for further reading. Distributed in the U.S. by Enfield. Annotation : 2005 Book News, Inc., Portland, OR (booknews.com).

Semiconductor Devices
Semiconductor Devices

Author: Amal Banerjee

Publisher: Springer Nature

Published: 2023-10-16

Total Pages: 305

ISBN-13: 3031457501

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This book examines in detail how a semiconductor device is designed and fabricated to satisfy best the requirements of the target application. The author presents and explains both basic and state-of-art semiconductor industry standards used in large/small signal equivalent circuit models for semiconductor devices that electronics engineers routinely use in their design calculations. The presentation includes detailed, step-by-step information on how a semiconductor device is fabricated, and the very sophisticated supporting technologies used in the process flow. The author also explains how standard laboratory equipment can be used to extract useful performance metrics of a semiconductor device.