Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: Elsevier

Published: 2009-12-08

Total Pages: 670

ISBN-13: 0815519885

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A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: - Silicon as MEMS material - Material properties and measurement techniques - Analytical methods used in materials characterization - Modeling in MEMS - Measuring MEMS - Micromachining technologies in MEMS - Encapsulation of MEMS components - Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. - Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. - Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. - Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. - Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures

Optical MEMS, Nanophotonics, and Their Applications
Optical MEMS, Nanophotonics, and Their Applications

Author: Guangya Zhou

Publisher: CRC Press

Published: 2017-12-14

Total Pages: 548

ISBN-13: 1351647601

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This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.

Advanced Mechatronics and MEMS Devices II
Advanced Mechatronics and MEMS Devices II

Author: Dan Zhang

Publisher: Springer

Published: 2016-10-18

Total Pages: 719

ISBN-13: 3319321803

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This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.

Implications of Emerging Micro- and Nanotechnologies
Implications of Emerging Micro- and Nanotechnologies

Author: National Research Council

Publisher: National Academies Press

Published: 2003-02-06

Total Pages: 267

ISBN-13: 030908623X

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Expansion of micro-technology applications and rapid advances in nano-science have generated considerable interest by the Air Force in how these developments will affect the nature of warfare and how it could exploit these trends. The report notes four principal themes emerging from the current technological trends: increased information capability, miniaturization, new materials, and increased functionality. Recommendations about Air Force roles in micro- and nanotechnology research are presented including those areas in which the Air Force should take the lead. The report also provides a number of technical and policy findings and recommendations that are critical for effective development of the Air Force's micro- and nano-science and technology program

MEMS Technology for Biomedical Imaging Applications
MEMS Technology for Biomedical Imaging Applications

Author: Qifa Zhou

Publisher: MDPI

Published: 2019-10-23

Total Pages: 218

ISBN-13: 303921604X

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Biomedical imaging is the key technique and process to create informative images of the human body or other organic structures for clinical purposes or medical science. Micro-electro-mechanical systems (MEMS) technology has demonstrated enormous potential in biomedical imaging applications due to its outstanding advantages of, for instance, miniaturization, high speed, higher resolution, and convenience of batch fabrication. There are many advancements and breakthroughs developing in the academic community, and there are a few challenges raised accordingly upon the designs, structures, fabrication, integration, and applications of MEMS for all kinds of biomedical imaging. This Special Issue aims to collate and showcase research papers, short commutations, perspectives, and insightful review articles from esteemed colleagues that demonstrate: (1) original works on the topic of MEMS components or devices based on various kinds of mechanisms for biomedical imaging; and (2) new developments and potentials of applying MEMS technology of any kind in biomedical imaging. The objective of this special session is to provide insightful information regarding the technological advancements for the researchers in the community.

Outlook and Challenges of Nano Devices, Sensors, and MEMS
Outlook and Challenges of Nano Devices, Sensors, and MEMS

Author: Ting Li

Publisher: Springer

Published: 2017-02-22

Total Pages: 522

ISBN-13: 3319508245

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This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

Optical Nano and Micro Actuator Technology
Optical Nano and Micro Actuator Technology

Author: George K. Knopf

Publisher: CRC Press

Published: 2017-12-19

Total Pages: 666

ISBN-13: 1351833510

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In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.

Nanorods and Nanocomposites
Nanorods and Nanocomposites

Author: Morteza Sasani Ghamsari

Publisher: BoD – Books on Demand

Published: 2020-03-11

Total Pages: 282

ISBN-13: 1789844681

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The book, Nanorods and Nanocomposites aims to provide the reader with an overview of the recent advances made on the synthesis of nanorods and nanocomposites and their emerging applications for a better lifestyle. The nanorods are a surprising gift to materials science from the research field of nanoscale materials. Nanorods promise to serve as a building block of the next-generation electronic and optoelectronic devices. Nanocomposite materials are multiphase solid materials that have one organic or inorganic nanoarchitectured compound with various nanostructures, such as nanoparticles, nanowires, nanorods, and nano-films, etc., or with multiphase solid materials (metals, oxides, polymers, and carbon). Due to the progressive physical, chemical, electrical, thermal, optical, electrochemical, and catalytic properties of nanocomposites, they exhibit multi-functional characteristics in a variety of engineering applications such as piezoelectrics, thermoresistors, sensors, energy-related technologies, water purification catalysts, electro-photonics, and so on. Despite the wide variety of applications due to their unique nanostructures, the fabrication of nanocomposites and the realization of their applications in different fields remains a challenging task. The focus of this book is to provide a platform for presentation of the latest knowledge and recent progress in synthesis, functionalization, and applications of nanocomposite materials. It is expected that this book presents the most attractive and versatile technological developments in the field of nanorods and nanocomposite materials and their applications that will provide a better understanding of the currently ongoing research in related fields.

Handbook of Laser Technology and Applications
Handbook of Laser Technology and Applications

Author: Chunlei Guo

Publisher: CRC Press

Published: 2021-06-23

Total Pages: 495

ISBN-13: 100029692X

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This comprehensive handbook gives a fully updated guide to lasers and laser technologies, including the complete range of their technical applications. This forth volume covers laser applications in the medical, metrology and communications fields. Key Features: • Offers a complete update of the original, bestselling work, including many brand-new chapters. • Deepens the introduction to fundamentals, from laser design and fabrication to host matrices for solid-state lasers, energy level diagrams, hosting materials, dopant energy levels, and lasers based on nonlinear effects. • Covers new laser types, including quantum cascade lasers, silicon-based lasers, titanium sapphire lasers, terahertz lasers, bismuth-doped fiber lasers, and diode-pumped alkali lasers. • Discusses the latest applications, e.g., lasers in microscopy, high-speed imaging, attosecond metrology, 3D printing, optical atomic clocks, time-resolved spectroscopy, polarization and profile measurements, pulse measurements, and laser-induced fluorescence detection. • Adds new sections on laser materials processing, laser spectroscopy, lasers in imaging, lasers in environmental sciences, and lasers in communications. This handbook is the ideal companion for scientists, engineers, and students working with lasers, including those in optics, electrical engineering, physics, chemistry, biomedicine, and other relevant areas.