Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Sensors are all around us. They are in phones, cars, planes, trains, robots, mils, lathes, packaging lines, chemical plants, power plants, etc. Modern technology could not exist without sensors. The sensors measure what we need to know and the control system then performs the desired actions. When an engineer builds any machine he or she needs to have basic understanding about sensors. Correct sensors need to be selected for the design right from the start. The designer needs to think about the ranges, required accuracy, sensor cost, wiring, correct installation and placement etc. Without the basic knowledge of sensors fundamental no machine can be built successfully today. The objective of this book is to provide the basic knowledge to electrical and mechanical engineers, engineering students and hobbyist from the field of sensors to help them with the selection of “proper” sensors for their designs. No background knowledge in electrical engineering is required, all the necessary basics are provided. The book explains how a sensor works, in what ranges it can be used, with what accuracy etc. It also provides examples of industrial application for selected sensors. The book covers all the major variables in mechanical engineering such as temperature, force, torque, pressure, humidity, position, speed, acceleration etc. The approach is always as follows: - Explain how the sensor works, what is the principle - Explain in what ranges and with what accuracy it can work - Describe its properties with charts, eventually equations - Give examples of such sensors including application examples
Unlike other treatments of sensors or actuators, this book approaches the devices from the point of view of the fundamental coupling mechanism between the electrical and mechanical behaviour. The principles of operation of the solenoid are the same in both cases, and this book thus treats them together. It begins with a discussion of systems analysis as a tool for modelling transducers, before turning to a detailed discussion of transduction mechanisms. The whole is rounded off by an input/output analysis of transducers.
This practical handbook provides the knowledge needed to specify and apply the best piezoresistive pressure sensors to interface with microprocessors and computers. Eliminating the details of semiconductor physics, it clarifies the three kinds of pressure measurement, explains silicon sensor design
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Sensors and actuators are used daily in countless applications to ensure more accurate and reliable workflows and safer environments. Many students and young engineers with engineering and science backgrounds often come prepared with circuits and programming skills but have little knowledge of sensors and sensing strategies and their interfacing.
Molecular Sensors and Nanodevices: Principles, Designs and Applications in Biomedical Engineering, Second Edition is designed to be used as a foundational text, aimed at graduates, advanced undergraduates, early-career engineers and clinicians. The book presents the essential principles of molecular sensors, including theories, fabrication techniques and reviews. In addition, important devices and recently, highly-cited research outcomes are also cited. This differentiates the book from other titles on the market whose primary focus is more research-oriented and aimed at more of a niche market. - Covers the fundamental principles of device engineering and molecular sensing, sensor theories and applications in biomedical science and engineering - Introduces nano/micro fabrication techniques, including MEMS, bioMEMS, microTAS and nanomaterials science that are essential in the miniaturization of versatile molecular sensors - Explores applications of nanomaterials and biomaterials, including proteins, DNAs, nanoparticles, quantum dots, nanotubes/wires and graphene in biomedicine
Advances in materials science and engineering have paved the way for the development of new and more capable sensors. Drawing upon case studies from manufacturing and structural monitoring and involving chemical and long wave-length infrared sensors, this book suggests an approach that frames the relevant technical issues in such a way as to expedite the consideration of new and novel sensor materials. It enables a multidisciplinary approach for identifying opportunities and making realistic assessments of technical risk and could be used to guide relevant research and development in sensor technologies.
This volume covers the various sensors related to automotive and aerospace sectors, discussing their properties as well as how they are realized, calibrated and deployed. Written by experts in the field, it provides a ready reference to product developers, researchers and students working on sensor design and fabrication, and provides perspective on both current and future research.
