Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher:
Published: 1999
Total Pages: 290
ISBN-13:
DOWNLOAD EBOOKRead and Download eBook Full
Author: Electrochemical Society. Dielectric Science and Technology Division
Publisher:
Published: 1999
Total Pages: 290
ISBN-13:
DOWNLOAD EBOOKAuthor: Kazuo Kondo
Publisher: The Electrochemical Society
Published: 2005
Total Pages: 422
ISBN-13:
DOWNLOAD EBOOKPapers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI fabrication, shape evolution, growth habit, and microstructure of electrodeposits. The most prominent example at present is the electrochemical deposition of copper for ULSI interconnects. Many other electrochemical processes at various stages of emergence and development hold promise for the electronics industry and beyond.
Author: Panayotis C. Andricacos
Publisher: The Electrochemical Society
Published: 1999
Total Pages: 418
ISBN-13: 9781566772310
DOWNLOAD EBOOKAuthor: Panayotis C. Andricacos
Publisher: The Electrochemical Society
Published: 2002
Total Pages: 262
ISBN-13: 9781566772730
DOWNLOAD EBOOK"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Author: G. S. Mathad
Publisher: The Electrochemical Society
Published: 2000
Total Pages: 358
ISBN-13: 9781566772549
DOWNLOAD EBOOKAuthor: John O. Dukovic
Publisher: The Electrochemical Society
Published: 2007-09
Total Pages: 288
ISBN-13: 1566775868
DOWNLOAD EBOOKThe papers in this issue describe the latest advances in fundamental and practical aspects of electrochemical processes for fabrication of microelectronic devices and related structures. Topics range from plating to etching, chips to packages, mechanisms to models, through-silicon vias to nanotubes, tin to ruthenium, capping to cooling, porous gold to porous alumina, probe-card springs to solder balls, electroless deposition to CMP, TFT-LCDs to magnetic nanowires and beyond.
Author: Milan Paunovic
Publisher: The Electrochemical Society
Published: 1998
Total Pages: 666
ISBN-13: 9781566771801
DOWNLOAD EBOOKAuthor: Electrochemical Society. Meeting
Publisher: The Electrochemical Society
Published: 2003
Total Pages: 620
ISBN-13: 9781566773768
DOWNLOAD EBOOKAuthor: Sunggyu Lee
Publisher: CRC Press
Published: 2005-11-01
Total Pages: 3338
ISBN-13: 1351237683
DOWNLOAD EBOOKThis second edition Encyclopedia supplies nearly 350 gold standard articles on the methods, practices, products, and standards influencing the chemical industries. It offers expertly written articles on technologies at the forefront of the field to maximize and enhance the research and production phases of current and emerging chemical manufacturing practices and techniques. This collecting of information is of vital interest to chemical, polymer, electrical, mechanical, and civil engineers, as well as chemists and chemical researchers. A complete reconceptualization of the classic reference series the Encyclopedia of Chemical Processing and Design, whose first volume published in 1976, this resource offers extensive A-Z treatment of the subject in five simultaneously published volumes, with comprehensive indexing of all five volumes in the back matter of each tome. It includes material on the design of key unit operations involved with chemical processes; the design, unit operation, and integration of reactors and separation systems; process system peripherals such as pumps, valves, and controllers; analytical techniques and equipment; and pilot plant design and scale-up criteria. This reference contains well-researched sections on automation, equipment, design and simulation, reliability and maintenance, separations technologies, and energy and environmental issues. Authoritative contributions cover chemical processing equipment, engineered systems, and laboratory apparatus currently utilized in the field. It also presents expert overviews on key engineering science topics in property predictions, measurements and analysis, novel materials and devices, and emerging chemical fields. ALSO AVAILABLE ONLINE This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for both researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
Author: Sunggyu Lee
Publisher: Taylor & Francis US
Published: 2006
Total Pages: 768
ISBN-13: 9780824755003
DOWNLOAD EBOOKSupplying nearly 350 expertly-written articles on technologies that can maximize and enhance the research and production phases of current and emerging chemical manufacturing practices and techniques, this second edition provides gold standard articles on the methods, practices, products, and standards recently influencing the chemical industries. New material includes: design of key unit operations involved with chemical processes; design, unit operation, and integration of reactors and separation systems; process system peripherals such as pumps, valves, and controllers; analytical techniques and equipment; current industry practices; and pilot plant design and scale-up criteria.