Integrated Circuit Fabrication
Integrated Circuit Fabrication

Author: James D. Plummer

Publisher: Cambridge University Press

Published: 2023-10-31

Total Pages: 680

ISBN-13: 1009303570

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Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook, for students from a range of STEM backgrounds, with a focus on big-picture thinking and industry-grade simulation. Includes over 450 full-color figures and over 280 homework problems, with solutions and lecture slides for instructors.

Temperature Measurement during Millisecond Annealing
Temperature Measurement during Millisecond Annealing

Author: Denise Reichel

Publisher: Springer

Published: 2016-01-07

Total Pages: 128

ISBN-13: 365811388X

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Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.