Advanced Processes for 193-nm Immersion Lithography

Advanced Processes for 193-nm Immersion Lithography

Author: Yayi Wei

Publisher: SPIE Press

Published: 2009

Total Pages: 338

ISBN-13: 0819475572

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This book is a comprehensive guide to advanced processes and materials used in 193-nm immersion lithography (193i). It is an important text for those new to the field as well as for current practitioners who want to broaden their understanding of this latest technology. The book can be used as course material for graduate students of electrical engineering, material sciences, physics, chemistry, and microelectronics engineering and can also be used to train engineers involved in the manufacture of integrated circuits. It provides techniques for selecting critical materials (topcoats, photoresists, and antireflective coatings) and optimizing immersion processes to ensure higher performance and lower defectivity at lower cost. This book also includes sections on shrinking, trimming, and smoothing of the resist pattern to reduce feature sizes and line-edge roughness. Finally, it describes the recent development of 193i in combination with double exposure and double patterning.


Sustainable Green Catalytic Processes

Sustainable Green Catalytic Processes

Author: Mousumi Sen

Publisher: John Wiley & Sons

Published: 2024-10-01

Total Pages: 564

ISBN-13: 1394212550

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Did you know that 95% of chemicals in industry are synthesized using catalysts? Sustainable Green Catalytic Processes offer concise descriptions of the application of catalysts in orchestrating eco-friendly transformation. These catalysts have enhanced selectivity for desired products while minimizing the creation of unwanted products. The book aims to present a collection of chapters related to green synthesis and methodologies and their applications in catalysis. These approaches have garnered attention from scientists in developing sustainable catalyst protocols that are environmentally greener and eco-friendly. This book aims to present a collection of chapters related to green synthesis and methodologies to motivate biochemists and engineers to provide a more sustainable environmental process. The first chapter focuses on the creation of ecologically friendly chemical processes. Another chapter frames the recent advances in heterogeneous photocatalysis and its applications. The book gives insights into the mechanisms underlying the total synthesis and functionalization of natural products through light-driven reactions. It reflects the new challenges as the chemical industry transitions to environmentally friendly and sustainable chemistry.


Handbook for cleaning/decontamination of surfaces

Handbook for cleaning/decontamination of surfaces

Author: Ingegard Johansson

Publisher: Elsevier

Published: 2007-06-20

Total Pages: 994

ISBN-13: 0080555535

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The focus of Handbook for Cleaning/Decontamination of Surfaces lies on cleaning and decontamination of surfaces and solid matter, hard as well as soft. Bringing together in a 2-volume reference source: - current knowledge of the physico-chemical fundamentals underlying the cleaning process; - the different needs for cleaning and how these needs are met by various types of cleaning processes and cleaning agents, including novel approaches; - how to test that cleaning has taken place and to what extent; - the effects of cleaning on the environment; - future trends in cleaning and decontamination, for example the idea of changing surfaces, to hinder the absorbance of dirt and thus make cleaning easier. A brief introduction is given to the legal demands concerning the environment and a historical background, in terms of development of detergents, from soaps to the modern sophisticated formulations. Bactericides, their use and the environmental demands on them are covered. Thorough discussions of mechanisms for cleaning are given in several chapters, both general basic concepts and special cases like particle cleaning and cleaning using microemulsion concepts. * General understanding of how cleaning works, function of ingredients and formulations * Overview of environmental issues and demands from the society in the area * Gives basic formulas for cleaning preparations in most areas


The Design, Synthesis, and Optimization of Nanomaterials Fabricated in Supercritical Carbon Dioxide

The Design, Synthesis, and Optimization of Nanomaterials Fabricated in Supercritical Carbon Dioxide

Author: Michael John Casciato

Publisher:

Published: 2013

Total Pages:

ISBN-13:

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This thesis presents investigations into the design and synthesis of nanomaterials in supercritical carbon dioxide (sc-CO2) as well as novel experimental design methodologies. First, the process-structure-property relationships are studied for the deposition of materials from organometallic precursors in sc-CO2. The materials that were investigated in these studies were: (1) the semiconductor material copper zinc tin sulfide (Cu2ZnSnS4, or CZTS), which has application in solar energy capture; (2) zinc sulfide nanoparticles deposited onto carbon nanotubes, which have application in optoelectronics; and (3) silver nanoparticles deposited on silicon and glass wafer surfaces, which find application as biosensors via surface enhanced Raman spectroscopy. Next, two novel experimental design methodologies were implemented. The first is termed layers of experiment with adaptive combined design (LoE/ACD), which efficiently optimizes a process that is expensive and time consuming to study by zooming in on the process optimum through successive layers. The mean silver nanoparticle size was optimized as a function of temperature in the sc-CO2 system using the LoE/ACD approach. The second experimental design methodology is called initial experimental design (IED). The IED methodology was developed to choose the first round of experiments for a system that is expensive to study (in terms of time and money), poorly understood, and possesses a related, non-identical system that is well-studied. The IED approach was used to optimize the mean iridium nanoparticle size as a function of temperature given expert opinion, prior data, and an engineering model for silver nanoparticles synthesized in sc-CO2.


Handbook of Nanophysics

Handbook of Nanophysics

Author: Klaus D. Sattler

Publisher: CRC Press

Published: 2010-09-17

Total Pages: 782

ISBN-13: 1420075519

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Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanophotonics. Handbook of Nanophysics: Nanoelectronics and Nanophotonics explores important recent applications of nanophysics in the areas of electronics and photonics. Each peer-reviewed c


Beyond the Molecular Frontier

Beyond the Molecular Frontier

Author: National Research Council

Publisher: National Academies Press

Published: 2003-03-19

Total Pages: 238

ISBN-13: 0309168392

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Chemistry and chemical engineering have changed significantly in the last decade. They have broadened their scopeâ€"into biology, nanotechnology, materials science, computation, and advanced methods of process systems engineering and controlâ€"so much that the programs in most chemistry and chemical engineering departments now barely resemble the classical notion of chemistry. Beyond the Molecular Frontier brings together research, discovery, and invention across the entire spectrum of the chemical sciencesâ€"from fundamental, molecular-level chemistry to large-scale chemical processing technology. This reflects the way the field has evolved, the synergy at universities between research and education in chemistry and chemical engineering, and the way chemists and chemical engineers work together in industry. The astonishing developments in science and engineering during the 20th century have made it possible to dream of new goals that might previously have been considered unthinkable. This book identifies the key opportunities and challenges for the chemical sciences, from basic research to societal needs and from terrorism defense to environmental protection, and it looks at the ways in which chemists and chemical engineers can work together to contribute to an improved future.


Acrylate Polymers for Advanced Applications

Acrylate Polymers for Advanced Applications

Author: Ángel Serrano-Aroca

Publisher: BoD – Books on Demand

Published: 2020-05-06

Total Pages: 108

ISBN-13: 1789851831

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This book presents five chapters, organised into two sections, on the latest developments in acrylate polymers materials in terms of properties, new ideas in design, synthesis and detailed applications. Section I presents three chapters on acrylate polymer properties and advanced applications such as pH dependence acrylate-derivative polyelectrolyte properties and polymer material classification as acrylic heat resistant glass and polycarbonate antiballistic glass. Section II includes two chapters on acrylic-based materials in the form of hydrogels, interpenetrated polymer networks, composites and nanocomposites for biomedical and bioengineering applications such as tissue engineering, antimicrobial therapy, orthopaedics and ophthalmologic devices.