High-k Gate Dielectrics for CMOS Technology
High-k Gate Dielectrics for CMOS Technology

Author: Gang He

Publisher: John Wiley & Sons

Published: 2012-08-10

Total Pages: 560

ISBN-13: 3527646361

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A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies. Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.

Physics and Technology of High-k Gate Dielectrics II
Physics and Technology of High-k Gate Dielectrics II

Author: Samares Kar

Publisher: The Electrochemical Society

Published: 2004

Total Pages: 512

ISBN-13: 9781566774055

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"This volume is the proceedings of The Second International Symposium on High Dielectric Constant Materials: Materials Science, Processing, Reliability, and Manufacturing Issues ... and was held during [the] 204th Meeting [of the Electrochemical Society] ..."--P. v.

Physics and Technology of High-k Gate Dielectrics 4
Physics and Technology of High-k Gate Dielectrics 4

Author: Samares Kar

Publisher: The Electrochemical Society

Published: 2006

Total Pages: 565

ISBN-13: 1566775035

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This issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Physics and Technology of High-k Gate Dielectrics 5
Physics and Technology of High-k Gate Dielectrics 5

Author: Samares Kar

Publisher: The Electrochemical Society

Published: 2007

Total Pages: 676

ISBN-13: 1566775701

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This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

Physics and Technology of High-k Gate Dielectrics 6
Physics and Technology of High-k Gate Dielectrics 6

Author: S. Kar

Publisher: The Electrochemical Society

Published: 2008-10

Total Pages: 550

ISBN-13: 1566776511

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The issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, novel and still higher permittivity dielectric materials, CMOS processing with high-K layers, metals for gate electrodes, interface issues, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.

High Permittivity Gate Dielectric Materials
High Permittivity Gate Dielectric Materials

Author: Samares Kar

Publisher: Springer Science & Business Media

Published: 2013-06-25

Total Pages: 515

ISBN-13: 3642365353

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"The book comprehensively covers all the current and the emerging areas of the physics and the technology of high permittivity gate dielectric materials, including, topics such as MOSFET basics and characteristics, hafnium-based gate dielectric materials, Hf-based gate dielectric processing, metal gate electrodes, flat-band and threshold voltage tuning, channel mobility, high-k gate stack degradation and reliability, lanthanide-based high-k gate stack materials, ternary hafnia and lanthania based high-k gate stack films, crystalline high-k oxides, high mobility substrates, and parameter extraction. Each chapter begins with the basics necessary for understanding the topic, followed by a comprehensive review of the literature, and ultimately graduating to the current status of the technology and our scientific understanding and the future prospects." .

High k Gate Dielectrics
High k Gate Dielectrics

Author: Michel Houssa

Publisher: CRC Press

Published: 2003-12-01

Total Pages: 614

ISBN-13: 1420034146

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The drive toward smaller and smaller electronic componentry has huge implications for the materials currently being used. As quantum mechanical effects begin to dominate, conventional materials will be unable to function at scales much smaller than those in current use. For this reason, new materials with higher electrical permittivity will be requ