Materials and Processes for Next Generation Lithography
Materials and Processes for Next Generation Lithography

Author:

Publisher: Elsevier

Published: 2016-11-08

Total Pages: 636

ISBN-13: 0081003587

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As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. - Assembles up-to-date information from the world's premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation - Includes information on processing and metrology techniques - Brings together multiple approaches to litho pattern recording from academia and industry in one place

Microlithography
Microlithography

Author: Bruce W. Smith

Publisher: CRC Press

Published: 2020-05-01

Total Pages: 913

ISBN-13: 1351643444

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The completely revised Third Edition to the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from fundamental principles to advanced topics of nanoscale lithography. The book is divided into chapters covering all important aspects related to the imaging, materials, and processes that have been necessary to drive semiconductor lithography toward nanometer-scale generations. Renowned experts from the world’s leading academic and industrial organizations have provided in-depth coverage of the technologies involved in optical, deep-ultraviolet (DUV), immersion, multiple patterning, extreme ultraviolet (EUV), maskless, nanoimprint, and directed self-assembly lithography, together with comprehensive descriptions of the advanced materials and processes involved. New in the Third Edition In addition to the full revision of existing chapters, this new Third Edition features coverage of the technologies that have emerged over the past several years, including multiple patterning lithography, design for manufacturing, design process technology co-optimization, maskless lithography, and directed self-assembly. New advances in lithography modeling are covered as well as fully updated information detailing the new technologies, systems, materials, and processes for optical UV, DUV, immersion, and EUV lithography. The Third Edition of Microlithography: Science and Technology authoritatively covers the science and engineering involved in the latest generations of microlithography and looks ahead to the future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current technology, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to better understand the complex world of microlithography science and technology.

MEMS Materials and Processes Handbook
MEMS Materials and Processes Handbook

Author: Reza Ghodssi

Publisher: Springer Science & Business Media

Published: 2011-03-18

Total Pages: 1211

ISBN-13: 0387473181

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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Macromolecular Engineering, Volume 1
Macromolecular Engineering, Volume 1

Author: Krzysztof Matyjaszewski

Publisher: Wiley-VCH

Published: 2007-04-09

Total Pages: 880

ISBN-13: 9783527314461

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The book provides a state of the art description of the synthetic tools to precisely control various aspects of macromolecular structure including chain composition, microstructure, functionality and topology as well as modern characterization techniques at molecular and macroscopic level for various properties of well-defined (co)polymers in solution, bulk and at surfaces. The book addresses also the correlation of molecular structure with macroscopic properties additionally affected by processing. Finally, some emerging applications for the (co)polymers are highlighted.

Metallopolymer Nanocomposites
Metallopolymer Nanocomposites

Author: A.D. Pomogailo

Publisher: Springer Science & Business Media

Published: 2006-01-27

Total Pages: 577

ISBN-13: 3540265236

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This book presents and analyzes the essential data on nanoscale metal clusters dispersed in, or chemically bonded with polymers. Special attention is paid to the in situ synthesis of the nanocomposites, their chemical interactions, and the size and distribution of the particles in the polymer matrix. Numerous novel nanocomposites are described with regard to their mechanical, electrophysical, optical, magnetic, catalytic and biological properties. Their applications, present and future, are outlined.

Printed Batteries
Printed Batteries

Author: Senentxu Lanceros-Méndez

Publisher: John Wiley & Sons

Published: 2018-04-23

Total Pages: 270

ISBN-13: 1119287421

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Offers the first comprehensive account of this interesting and growing research field Printed Batteries: Materials, Technologies and Applications reviews the current state of the art for printed batteries, discussing the different types and materials, and describing the printing techniques. It addresses the main applications that are being developed for printed batteries as well as the major advantages and remaining challenges that exist in this rapidly evolving area of research. It is the first book on printed batteries that seeks to promote a deeper understanding of this increasingly relevant research and application area. It is written in a way so as to interest and motivate readers to tackle the many challenges that lie ahead so that the entire research community can provide the world with a bright, innovative future in the area of printed batteries. Topics covered in Printed Batteries include, Printed Batteries: Definition, Types and Advantages; Printing Techniques for Batteries, Including 3D Printing; Inks Formulation and Properties for Printing Techniques; Rheological Properties for Electrode Slurry; Solid Polymer Electrolytes for Printed Batteries; Printed Battery Design; and Printed Battery Applications. Covers everything readers need to know about the materials and techniques required for printed batteries Informs on the applications for printed batteries and what the benefits are Discusses the challenges that lie ahead as innovators continue with their research Printed Batteries: Materials, Technologies and Applications is a unique and informative book that will appeal to academic researchers, industrial scientists, and engineers working in the areas of sensors, actuators, energy storage, and printed electronics.

Implantable Bioelectronics
Implantable Bioelectronics

Author: Evgeny Katz

Publisher: John Wiley & Sons

Published: 2014-02-27

Total Pages: 566

ISBN-13: 3527673164

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Here the renowned editor Evgeny Katz has chosen contributions that cover a wide range of examples and issues in implantable bioelectronics, resulting in an excellent overview of the topic. The various implants covered include biosensoric and prosthetic devices, as well as neural and brain implants, while ethical issues, suitable materials, biocompatibility, and energy-harvesting devices are also discussed. A must-have for both newcomers and established researchers in this interdisciplinary field that connects scientists from chemistry, material science, biology, medicine, and electrical engineering.

Functional and Smart Materials
Functional and Smart Materials

Author: Chander Prakash

Publisher: CRC Press

Published: 2020-10-25

Total Pages: 239

ISBN-13: 1000193152

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This book presents a comprehensive and broad-spectrum picture of the state-of-the-art research, development, and commercial prospective of various discoveries conducted in the real world of functional and smart materials. This book presents various synthesis and fabrication routes of function and smart materials for universal applications such as material science, mechanical engineering, manufacturing, metrology, nanotechnology, physics, biology, chemistry, civil engineering, and food science. The content of this book opens various scientific horizons proved to be beneficial for uplifting the standards of day-to-day practices in the biomedical domain. Myriad innovations in the materials science and engineering are transforming our everyday lives in extraordinary ways. This book captures the emerging areas of materials science and advanced manufacturing engineering and presents recent trends in research for researchers, field engineers, and academic professionals.