Optical Metrology and Inspection for Industrial Applications
Author: Kevin Harding
Publisher: SPIE-International Society for Optical Engineering
Published: 2010
Total Pages: 532
ISBN-13: 9780819483850
DOWNLOAD EBOOKIncludes Proceedings Vol. 7821
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Handbook of Optical Metrology
Author: Toru Yoshizawa
Publisher: CRC Press
Published: 2017-07-28
Total Pages: 866
ISBN-13: 1351831844
DOWNLOAD EBOOKHandbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.
Introduction to Metrology Applications in IC Manufacturing
Author: Bo Su
Publisher:
Published: 2015
Total Pages: 187
ISBN-13: 9781628416626
DOWNLOAD EBOOKMetrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial Text range from metrology at its most basic level to future predictions and challenges, including measurement methods, industrial applications, fundamentals of traditional measurement system characterization and calibration, measurement system characterization and calibration, semiconductor-specific applications, optical metrology measurement techniques, charged particle measurement techniques, x-ray and in situ metrology, hybrid metrology, and mask making. Includes example spreadsheets of measurement uncertainty analysis--specifically, precision, matching, and relative accuracy.
Harnessing Light
Author: National Research Council
Publisher: National Academies Press
Published: 1998-09-25
Total Pages: 358
ISBN-13: 0309059917
DOWNLOAD EBOOKOptical science and engineering affect almost every aspect of our lives. Millions of miles of optical fiber carry voice and data signals around the world. Lasers are used in surgery of the retina, kidneys, and heart. New high-efficiency light sources promise dramatic reductions in electricity consumption. Night-vision equipment and satellite surveillance are changing how wars are fought. Industry uses optical methods in everything from the production of computer chips to the construction of tunnels. Harnessing Light surveys this multitude of applications, as well as the status of the optics industry and of research and education in optics, and identifies actions that could enhance the field's contributions to society and facilitate its continued technical development.
Optical Inspection of Microsystems
Author: Wolfgang Osten
Publisher: CRC Press
Published: 2018-10-03
Total Pages: 524
ISBN-13: 1420019163
DOWNLOAD EBOOKWhere conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Digital Optical Measurement Techniques and Applications
Author: Pramod Rastogi
Publisher: Artech House
Published: 2015-05-01
Total Pages: 473
ISBN-13: 1608078078
DOWNLOAD EBOOKThis new resource explains the principles and applications of today’s digital optical measurement techniques. From start to finish, each chapter provides a concise introduction to the concepts and principles of digital optical metrology, followed by a detailed presentation of their applications. The development of all these topics, including their numerous methods, principles, and applications, has been illustrated using a large number of easy-to-understand figures. This book aims to not only help the reader identify the appropriate techniques in function of the measurement requirements, but also assess modern digital measurement systems.
Optical Metrology
Author: Olivério D.D. Soares
Publisher: Springer Science & Business Media
Published: 2012-12-06
Total Pages: 794
ISBN-13: 9400936095
DOWNLOAD EBOOKOptical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.
Optical Metrology and Inspection for Industrial Applications
Author: Society of Photo-Optical Instrumentation Engineers
Publisher:
Published: 2022
Total Pages: 0
ISBN-13: 9781510657052
DOWNLOAD EBOOKOptical Metrology for Precision Engineering
Author: Wei Gao
Publisher: Walter de Gruyter GmbH & Co KG
Published: 2021-11-22
Total Pages: 655
ISBN-13: 3110542366
DOWNLOAD EBOOKThis book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Industrial Metrology
Author: Graham T. Smith
Publisher: Springer Science & Business Media
Published: 2013-04-17
Total Pages: 336
ISBN-13: 1447138147
DOWNLOAD EBOOKThe subject of this book is surface metrology, in particular two major aspects: surface texture and roundness. It has taken a long time for manufacturing engineers and designers to realise the usefulness of these features in quality of conformance and quality of design. Unfortunately this awareness has come at a time when engineers versed in the use and specification of surfaces are at a premium. Traditionally surface metrology usage has been dictated by engineers who have served long and demanding apprenticeships, usually in parallel with studies leading to technician-level qualifications. Such people understood the processes and the achievable accuracies of machine tools, thereby enabling them to match production capability with design requirements. This synergy, has been made possible by the understanding of adherence to careful metrological procedures and a detailed knowledge of surface measuring instruments and their operation, in addition to wider inspection room techniques. With the demise in the UK of polytechnics and technical colleges, this source of skilled technicians has all but dried up. The shortfall has been made up of semi skilled craftsmen, or inexperienced graduates who cannot be expected to satisfy tradition al or new technology needs. Miniaturisation, for example, has had a pro found effect. Engineering parts are now routinely being made with nanometre surface texture and fiatness. At these molecular and atomic scales, the engineer has to be a physicist.
