Nanoscale Standards by Metrological AFM and Other Instruments

Nanoscale Standards by Metrological AFM and Other Instruments

Author: Ichiko Misumi

Publisher:

Published: 2021

Total Pages: 0

ISBN-13: 9780750331913

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The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.


Nanoscale Calibration Standards and Methods

Nanoscale Calibration Standards and Methods

Author: Günter Wilkening

Publisher: John Wiley & Sons

Published: 2006-05-12

Total Pages: 541

ISBN-13: 3527606874

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The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing


Measurement Technology and Intelligent Instruments VIII

Measurement Technology and Intelligent Instruments VIII

Author: Wei Gao

Publisher: Trans Tech Publications Ltd

Published: 2008-06-12

Total Pages: 671

ISBN-13: 3038131830

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Volume is indexed by Thomson Reuters BCI (WoS). Measurement, rigorously defined as ‘ascertaining the size, amount or degree of a measurand by instrumental comparison with a standard unit or by indirect calculation based upon theory’, is what makes science and technology different to imagination. Measurement is essential in industry, commerce and daily life. In the manufacturing industry in particular, measurement and instrumentation technology play increasingly important roles not only in the traditional field of manufacturing but also in the new fields of micro/nano technology and bioengineering. This book presents recent advances in the use of measurement and instrumentation in the manufacturing industry. A wide range of topics are covered including: micro/nano-metrology,precision measurements,online and in-process measurements,surface metrology,optical metrology and image processing,bio-measurement, sensor technology,intelligent measurement and instrumentation,uncertainty, traceability and calibration and signal-processing algorithms.


Nanoscale Calibration Standards and Methods

Nanoscale Calibration Standards and Methods

Author: Günter Wilkening

Publisher: John Wiley & Sons

Published: 2005-07-01

Total Pages: 554

ISBN-13: 9783527405022

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The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing


Metrology and Standardization for Nanotechnology

Metrology and Standardization for Nanotechnology

Author: Elisabeth Mansfield

Publisher: John Wiley & Sons

Published: 2017-01-20

Total Pages: 589

ISBN-13: 3527800298

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For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.


Encyclopedia of Nanoscience and Society

Encyclopedia of Nanoscience and Society

Author: David H. Guston

Publisher: SAGE Publications

Published: 2010-07-14

Total Pages: 1025

ISBN-13: 1452266174

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Labeled either as the "next industrial revolution" or as just "hype," nanoscience and nanotechnologies are controversial, touted by some as the likely engines of spectacular transformation of human societies and even human bodies, and by others as conceptually flawed. These challenges make an encyclopedia of nanoscience and society an absolute necessity. Providing a guide to what these understandings and challenges are about, the Encyclopedia of Nanoscience and Society offers accessible descriptions of some of the key technical achievements of nanoscience along with its history and prospects. Rather than a technical primer, this encyclopedia instead focuses on the efforts of governments around the world to fund nanoscience research and to tap its potential for economic development as well as to assess how best to regulate a new technology for the environmental, occupational, and consumer health and safety issues related to the field. Contributions examine and analyze the cultural significance of nanoscience and nanotechnologies and describe some of the organizations, and their products, that promise to make nanotechnologies a critical part of the global economy. Written by noted scholars and practitioners from around the globe, these two volumes offer nearly 500 entries describing the societal aspects of nanoscience and nanotechnology. Key Themes - Art, Design, and Materials - Bionanotechnology Centers - Context - Economics and Business - Engagement and the Public - Environment and Risk - Ethics and Values - Geographies and Distribution - History and Philosophy - Integration and Interdisciplinarity - Nanotechnology Companies - Nanotechnology Organizations


Fundamental Principles of Engineering Nanometrology

Fundamental Principles of Engineering Nanometrology

Author: Richard Leach

Publisher: William Andrew

Published: 2009-09-03

Total Pages: 349

ISBN-13: 1437778321

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge


Metrology and Instrumentation

Metrology and Instrumentation

Author: Samir Mekid

Publisher: John Wiley & Sons

Published: 2021-12-29

Total Pages: 404

ISBN-13: 1119721733

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Metrology and Instrumentation: Practical Applications for Engineering and Manufacturing provides students and professionals with an accessible foundation in the metrology techniques, instruments, and governing standards used in mechanical engineering and manufacturing. The book opens with an overview of metrology units and scale, then moves on to explain topics such as sources of error, calibration systems, uncertainty, and dimensional, mechanical, and thermodynamic measurement systems. A chapter on tolerance stack-ups covers GD&T, ASME Y14.5-2018, and the ISO standard for general tolerances, while a chapter on digital measurements connects metrology to newer, Industry 4.0 applications.


Atomic Force Microscopy

Atomic Force Microscopy

Author: Peter Eaton

Publisher: Oxford University Press

Published: 2010-03-25

Total Pages: 257

ISBN-13: 0199570450

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Atomic force microscopes are very important tools for the advancement of science and technology. This book provides an introduction to the microscopes so that scientists and engineers can learn both how to use them, and what they can do.


Nanoparticle Technologies

Nanoparticle Technologies

Author: Farid Bensebaa

Publisher: Academic Press

Published: 2012-12-31

Total Pages: 557

ISBN-13: 0080919278

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This book is a good introductory work to nanoparticle technology. It consists of nine complementary chapters that can be read independently. This book covers promising nanoparticles fabrication technologies with a focus on scalable processes. Integration of nanoparticles into 2D and 3D structures are covered in detail. The most promising applications of nanoparticles in the energy, optoelectronic and biomedical sectors are summarized and discussed. Current issues and challenges related to nanoparticles production and utilisation are also discussed in the book. Complete and simple overview of the field Contains practical examples that makes the book also accessible for industrialists, engineers and managers Chapters can be read relatively independently so experienced researchers can go directly to the them of interest Advantages, drawbacks and challenges are described with practical examples