Metrology and Standardization for Nanotechnology
Metrology and Standardization for Nanotechnology

Author: Elisabeth Mansfield

Publisher: John Wiley & Sons

Published: 2017-01-20

Total Pages: 630

ISBN-13: 3527800050

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For the promotion of global trading and the reduction of potential risks, the role of international standardization of nanotechnologies has become more and more important. This book gives an overview of the current status of nanotechnology including the importance of metrology and characterization at the nanoscale, international standardization of nanotechnology, and industrial innovation of nano-enabled products. First the field of nanometrology, nanomaterial standardization and nanomaterial innovation is introduced. Second, major concepts in analytical measurements are given in order to provide a basis for the reliable and reproducible characterization of nanomaterials. The role of standards organizations are presented and finally, an overview of risk management and the commercial impact of metrology and standardization for industrial innovations.

Nanotechnology Standards
Nanotechnology Standards

Author: Vladimir Murashov

Publisher: Springer Science & Business Media

Published: 2011-02-01

Total Pages: 269

ISBN-13: 1441978534

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Written by a team of experts, Nanotechnology Standards provides the first comprehensive, state-of-the-art reviews of nanotechnology standards development, both in the field of standards development and in specific areas of nanotechnology. It also describes global standards-developing processes for nanotechnology, which can be extended to other emerging technologies. For topics related to nanotechnology, the reviews summarize active areas of standards development, supporting knowledge and future directions in easy-to-understand language aimed at a broad technical audience. This unique book is also an excellent resource for up-to-date information on the growing base of knowledge supporting the introduction of nanotechnology standards and applications into the market. Praise for this volume: “This book provides a valuable and detailed overview of current activities and issues relevant to the area as well as a useful summary of the short history of standardization for nanotechnologies and the somewhat longer history of standardization in general. I have no hesitation in recommending this book to anyone with an interest in nanotechnologies whether it is from a technical or societal perspective.” --Dr. Peter Hatto, Director of Research, IonBond Limited, Durham, UK

Fundamental Principles of Engineering Nanometrology
Fundamental Principles of Engineering Nanometrology

Author: Richard Leach

Publisher: William Andrew

Published: 2009-09-03

Total Pages: 349

ISBN-13: 1437778321

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. - Provides a basic introduction to measurement and instruments - Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force - Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) - Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) - Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Handbook of Surface Metrology
Handbook of Surface Metrology

Author: David J. Whitehouse

Publisher: Taylor & Francis

Published: 2023-03-17

Total Pages: 1015

ISBN-13: 1351442074

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Written by the leading authority in the subject, Handbook of Surface Metrology covers every conceivable aspect of measuring and characterizing a surface. Focusing both on theory and practice, the book provides useful guidelines for the design of precision instruments and presents data on the functional importance of surfaces. It also clearly explains the essential theory relevant to surface metrology. The book defines most terms and parameters according to national and international standards. Many examples and illustrations are drawn from the esteemed author's large fund of groundbreaking research work. This unparalleled, all-encompassing "metrology bible" is beneficial for engineering postgraduate students and researchers involved in tribology, instrumentation, data processing, and metrology.

Nanoscale Standards by Metrological AFM and Other Instruments
Nanoscale Standards by Metrological AFM and Other Instruments

Author: Ichiko Misumi

Publisher:

Published: 2021

Total Pages: 0

ISBN-13: 9780750331913

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The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.

Introduction to Quantum Metrology
Introduction to Quantum Metrology

Author: Waldemar Nawrocki

Publisher: Springer

Published: 2015-03-24

Total Pages: 287

ISBN-13: 3319156691

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This book presents the theory of quantum effects used in metrology and results of the author’s own research in the field of quantum electronics. The book provides also quantum measurement standards used in many branches of metrology for electrical quantities, mass, length, time and frequency. This book represents the first comprehensive survey of quantum metrology problems. As a scientific survey, it propagates a new approach to metrology with more emphasis on its connection with physics. This is of importance for the constantly developing technologies and nanotechnologies in particular. Providing a presentation of practical applications of the effects used in quantum metrology for the construction of quantum standards and sensitive electronic components, the book is useful for a wide audience of physicists and metrologists in the broad sense of both terms. In 2014 a new system of units, the so called Quantum SI, is introduced. This book helps to understand and approve the new system to both technology and academic community.

Metrology and Diagnostic Techniques for Nanoelectronics
Metrology and Diagnostic Techniques for Nanoelectronics

Author: Zhiyong Ma

Publisher: CRC Press

Published: 2017-03-27

Total Pages: 889

ISBN-13: 135173394X

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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

Nanotechnology and Nanoelectronics
Nanotechnology and Nanoelectronics

Author: Wolfgang Fahrner

Publisher: Springer Science & Business Media

Published: 2005-12-05

Total Pages: 277

ISBN-13: 3540266216

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Split a human hair thirty thousand times, and you have the equivalent of a nanometer. The aim of this work is to provide an introduction into nanotechnology for the s- entifically interested. However, such an enterprise requires a balance between comprehensibility and scientific accuracy. In case of doubt, preference is given to the latter. Much more than in microtechnology – whose fundamentals we assume to be known – a certain range of engineering and natural sciences are interwoven in nanotechnology. For instance, newly developed tools from mechanical engine- ing are essential in the production of nanoelectronic structures. Vice versa, - chanical shifts in the nanometer range demand piezoelectric-operated actuators. Therefore, special attention is given to a comprehensive presentation of the matter. In our time, it is no longer sufficient to simply explain how an electronic device operates; the materials and procedures used for its production and the measuring instruments used for its characterization are equally important. The main chapters as well as several important sections in this book end in an evaluation of future prospects. Unfortunately, this way of separating coherent - scription from reflection and speculation could not be strictly maintained. So- times, the complete description of a device calls for discussion of its inherent - tential; the hasty reader in search of the general perspective is therefore advised to study this work’s technical chapters as well.

Precision Nanometrology
Precision Nanometrology

Author: Wei Gao

Publisher: Springer Science & Business Media

Published: 2010-06-14

Total Pages: 358

ISBN-13: 1849962545

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Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.

Nanotechnology
Nanotechnology

Author: Jeremy Ramsden

Publisher: William Andrew

Published: 2016-05-11

Total Pages: 361

ISBN-13: 0323393144

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Nanotechnology: An Introduction, Second Edition, is ideal for the newcomer to nanotechnology, someone who also brings a strong background in one of the traditional disciplines, such as physics, mechanical or electrical engineering, or chemistry or biology, or someone who has experience working in microelectromechanical systems (MEMS) technology. This book brings together the principles, theory, and practice of nanotechnology, giving a broad, yet authoritative, introduction to the possibilities and limitations of this exciting and rapidly developing field. The book's author, Prof Ramsden, also discusses design, manufacture, and applications and their impact on a wide range of nanotechnology areas. - Provides an overview of the rapidly growing and developing field of nanotechnology - Focuses on key essentials, and structured around a robust anatomy of the subject - Brings together the principles, theory, and practice of nanotechnology, giving a broad, yet authoritative, introduction to the possibilities and limitations of this exciting and rapidly developing field