Smart Material Systems and MEMS
Smart Material Systems and MEMS

Author: Vijay K. Varadan

Publisher: John Wiley & Sons

Published: 2006-11-02

Total Pages: 418

ISBN-13: 0470093625

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Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Smart Mems and Sensor Systems
Smart Mems and Sensor Systems

Author: Elena Gaura

Publisher: Imperial College Press

Published: 2006

Total Pages: 553

ISBN-13: 1860949207

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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective. The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science. Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors. For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play. For the generalist (either in engineering or computing) or the technology manager the underpinning knowledge is provided, which can inform specialist decision making. Sample Chapter(s). Chapter 1: Markets and Applications (1,731 KB). Contents: Markets and Applications; Microfabrication Technologies; Sensor Electronics; Sensor Signal Enhancement; Case Study: Control Systems for Capacitive Inertial Sensors; Case Study: Adaptive Optics and Smart VLSI/MEMS Systems; Artificial Intelligence Techniques for Microsensors Identification and Compensation; Smart, Intelligent and Cogent MEMS Based Sensors; Sensor Arrays and Networks; Wireless and Ad Hoc Sensor Networks; Realising the Dream OCo A Case Study. Readership: Graduate students on courses in sensing, instrumentation, VLSI, and MEMS technology; researchers and academics dealing with smart sensor systems; practitioners who need to understand and apply the technology effectively."

Smart Sensors and MEMS
Smart Sensors and MEMS

Author: S Nihtianov

Publisher: Woodhead Publishing

Published: 2018-02-27

Total Pages: 606

ISBN-13: 0081020562

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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications

Soft Computing for Intelligent Systems
Soft Computing for Intelligent Systems

Author: Nikhil Marriwala

Publisher: Springer Nature

Published: 2021-06-22

Total Pages: 653

ISBN-13: 9811610487

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This book presents high-quality research papers presented at the International Conference on Soft Computing for Intelligent Systems (SCIS 2020), held during 18–20 December 2020 at University Institute of Engineering and Technology, Kurukshetra University, Kurukshetra, Haryana, India. The book encompasses all branches of artificial intelligence, computational sciences and machine learning which is based on computation at some level such as AI-based Internet of things, sensor networks, robotics, intelligent diabetic retinopathy, intelligent cancer genes analysis using computer vision, evolutionary algorithms, fuzzy systems, medical automatic identification intelligence system and applications in agriculture, health care, smart grid and instrumentation systems. The book is helpful for educators, researchers and developers working in the area of recent advances and upcoming technologies utilizing computational sciences in signal processing, imaging, computing, instrumentation, artificial intelligence and their applications.

Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: William Andrew

Published: 2015-09-02

Total Pages: 827

ISBN-13: 0323312233

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory

MEMS, NANO and Smart Systems
MEMS, NANO and Smart Systems

Author: Li Yuan

Publisher: Trans Tech Publications Ltd

Published: 2011-11-29

Total Pages: 5400

ISBN-13: 3038137685

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Selected, peer reviewed papers from the 2011 7th International Conference on MEMS, NANO and Smart Systems (ICMENS 2011), November 4-6, 2011, Kuala Lumpur, Malaysia

Materials and Failures in MEMS and NEMS
Materials and Failures in MEMS and NEMS

Author: Atul Tiwari

Publisher: John Wiley & Sons

Published: 2015-09-11

Total Pages: 424

ISBN-13: 1119083877

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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

New Materials and Devices Enabling 5G Applications and Beyond
New Materials and Devices Enabling 5G Applications and Beyond

Author: Nadine Collaert

Publisher: Elsevier

Published: 2024-01-24

Total Pages: 369

ISBN-13: 0128234504

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New Materials and Devices for 5G Applications and Beyond focuses on the materials, device architectures and enabling integration schemes for 5G applications and emerging technologies. It gives a comprehensive overview of the trade-offs, challenges and unique properties of novel upcoming technologies. Starting from the application side and its requirements, the book examines different technologies under consideration for the different functions, both more conventional to exploratory, and within this context the book provides guidance to the reader on how to possibly optimize the system for a particular application. This book aims at guiding the reader through the technologies required to enable 5G applications, with the main focus on mm-wave frequencies, up to THz. New Materials and Devises for 5G Applications and Beyond is suitable for industrial researchers and development engineers, and researchers in materials science, device engineering and circuit design. - Reviews challenges and emerging opportunities for materials, devices, and integration to enable 5G technologies - Includes discussion of technologies such as RF-MEMs, RF FINFETs, and transistors based on current and emerging materials (InP, GaN, etc.) - Focuses on mm-wave frequencies up to the terahertz regime

Recent Trends in Materials
Recent Trends in Materials

Author: K. Geetha

Publisher: Springer Nature

Published: 2022-10-31

Total Pages: 484

ISBN-13: 9811953953

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This book presents the select proceedings of 4th International Conference on Trends in Material Science and Inventive Materials (ICTMIM 2022). Various topics covered in this book are nanotechnology in materials science, green and sustainable materials, semiconductor & electronic materials and devices, bio electronic materials and sensors, thin films, materials surface and interfaces, modern electronic materials, multilayered structures and composite materials, quantum-sized structures and nanocrystals, electronic biosensors, MEMS and sensors, light emitting materials, nanomaterials, opto-electronic materials, microwave and antenna, nanostructure fabrication and self-assembly, self-healable and stretchable configurations, data-driven materials design, advanced charge transfer and suitable interfaces, metallization and superconductivity. Given the contents, the book will be useful for students, researchers and professionals working in the area of material science and engineering.