MEMS Mirrors

MEMS Mirrors

Author: Huikai Xie

Publisher: MDPI

Published: 2018-05-04

Total Pages: 217

ISBN-13: 3038428671

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This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines


Foundry Microfabrication of Deformable Mirrors for Adaptive Optics

Foundry Microfabrication of Deformable Mirrors for Adaptive Optics

Author: William D. Cowan

Publisher:

Published: 1998-04-01

Total Pages: 285

ISBN-13: 9781423560623

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Microelectromechanical Systems (MEMS) is a rapidly emerging field of research in which batch fabrication processes are used to construct miniature devices. MEMS devices are particularly well suited to optical applications. Foundry microfabrication offers a substantial cost advantage for prototype system development. In this research, foundry MEMS processes are used to fabricate low-cost deformable mirror systems (MEM-DMs) for adaptive optics. The challenges and design trades associated with fabrication of continuous and segmented deformable mirrors in foundry processes are examined in detail. Micromirror surface figure is shown to be critically important. Beam steering and optical aberration correction experiments conclusively demonstrate the potential of low-cost MEM-DMs. The prototype MEM-DM systems are approximately 1/ 500th the cost of conventionally manufactured deformable mirrors. An innovative direct digital control scheme further reduces adaptive optic system cost by eliminating the digital to analog converter typically required for each controlled element. In addition to the MEM-DMs, other MEMS devices are shown. The thermally actuated piston micromirrors offer greater deflections for operation at longer optical wavelengths. Other MEMS devices examined include a series of tilting mirrors, pressure gauges, test structures, electrostatic scratch drive actuated rotors, and a new type of electrostatic cantilever motor with lateral motion output.


Modelling MEMS Deformable Mirrors for Astronomical Adaptive Optics

Modelling MEMS Deformable Mirrors for Astronomical Adaptive Optics

Author: Célia Blain

Publisher:

Published: 2012

Total Pages:

ISBN-13:

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As of July 2012, 777 exoplanets have been discovered utilizing mainly indirect detection techniques. The direct imaging of exoplanets is the next goal for astronomers, because it will reveal the diversity of planets and planetary systems, and will give access to the exoplanet's chemical composition via spectroscopy. With this spectroscopic knowledge, astronomers will be able to know, if a planet is terrestrial and, possibly, even find evidence of life. With so much potential, this branch of astronomy has also captivated the general public attention. The direct imaging of exoplanets remains a challenging task, due to (i) the extremely high contrast between the parent star and the orbiting exoplanet and (ii) their small angular separation. For ground-based observatories, this task is made even more difficult, due to the presence of atmospheric turbulence. High Contrast Imaging (HCI) instruments have been designed to meet this challenge. HCI instruments are usually composed of a coronagraph coupled with the full on-axis corrective capability of an Extreme Adaptive Optics (ExAO) system. An efficient coronagraph separates the faint planet's light from the much brighter starlight, but the dynamic boiling speckles, created by the stellar image, make exoplanet detection impossible without the help of a wavefront correction device. The Subaru Coronagraphic Extreme Adaptive Optics (SCExAO) system is a high performance HCI instrument developed at Subaru Telescope. The wavefront control system of SCExAO consists of three wavefront sensors (WFS) coupled with a 1024-actuator Micro-Electro-Mechanical-System (MEMS) deformable mirror (DM). MEMS DMs offer a large actuator density, allowing high count DMs to be deployed in small size beams. Therefore, MEMS DMs are an attractive technology for Adaptive Optics (AO) systems and are particularly well suited for HCI instruments employing ExAO technologies. SCExAO uses coherent light modulation in the focal plane introduced by the DM, for both wavefront sensing and correction. In this scheme, the DM is used to introduce known aberrations (speckles in the focal plane), which interfere with existing speckles. By monitoring the interference between the pre-existing speckles and the speckles added deliberately by the DM, it is possible to reconstruct the complex amplitude (amplitude and phase) of the focal plane speckles. Thus, the DM is used for wavefront sensing, in a scheme akin to phase diversity. For SCExAO and other HCI systems using phase diversity, the wavefront compensation is a mix of closed-loop and open-loop control of the DM. The successful implementation of MEMS DMs open-loop control relies on a thorough modelling of the DM response to the control system commands. The work presented in this thesis, motivated by the need to provide accurate DM control for the wavefront control system of SCExAO, was centred around the development of MEMS DM models. This dissertation reports the characterization of MEMS DMs and the development of two efficient modelling approaches. The open-loop performance of both approaches has been investigated. The model providing the best result has been implemented within the SCExAO wavefront control software. Within SCExAO, the model was used to command the DM to create focal plane speckles. The work is now focused on using the model within a full speckle nulling process and on increasing the execution speed to make the model suitable for on-sky operation.


Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems

Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems

Author: Zhizheng Wu

Publisher: Springer Science & Business Media

Published: 2012-10-22

Total Pages: 323

ISBN-13: 3642322298

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Modeling and Control of Magnetic Fluid Deformable Mirrors for Adaptive Optics Systems presents a novel design of wavefront correctors based on magnetic fluid deformable mirrors (MFDM) as well as corresponding control algorithms. The presented wavefront correctors are characterized by their linear, dynamic response. Various mirror surface shape control algorithms are presented along with experimental evaluations of the performance of the resulting adaptive optics systems. Adaptive optics (AO) systems are used in various fields of application to enhance the performance of optical systems, such as imaging, laser, free space optical communication systems, etc. This book is intended for undergraduate and graduate students, professors, engineers, scientists and researchers working on the design of adaptive optics systems and their various emerging fields of application. Zhizheng Wu is an associate professor at Shanghai University, China. Azhar Iqbal is a research associate at the University of Toronto, Canada. Foued Ben Amara is an assistant professor at the University of Toronto, Canada.


Experimental Analysis of Diffraction Effects from a Segmented MEMS Deformable Mirror for a Closed Loop Adaptive Optics System

Experimental Analysis of Diffraction Effects from a Segmented MEMS Deformable Mirror for a Closed Loop Adaptive Optics System

Author:

Publisher:

Published: 2010

Total Pages: 18

ISBN-13:

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Micro-Electro-Machined Systems (MEMS) have been increasingly used as mirrors in place of conventional continuous face sheet deformable mirrors (DM) in adaptive optics (AO) systems. Here we study the diffraction effects introduced into the optical path when a segmented MEMS DM is used to correct for the wavefront aberrations. Diffraction effects are monitored through the intermediate focus plane prior to the wavefront sensor. Low pass spatial filter is used at the plane in order to investigate how the making of various diffraction orders affects the phase. Measured phase and focal image plane data for various turbulence conditions are presented and analyzed.