Defects in Microelectronic Materials and Devices

Defects in Microelectronic Materials and Devices

Author: Daniel M. Fleetwood

Publisher: CRC Press

Published: 2008-11-19

Total Pages: 772

ISBN-13: 1420043773

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Uncover the Defects that Compromise Performance and ReliabilityAs microelectronics features and devices become smaller and more complex, it is critical that engineers and technologists completely understand how components can be damaged during the increasingly complicated fabrication processes required to produce them.A comprehensive survey of defe


Optical Waveguide Materials: Volume 244

Optical Waveguide Materials: Volume 244

Author: Matthijs M. Broer

Publisher: Mrs Proceedings

Published: 1992-04-03

Total Pages: 424

ISBN-13:

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.


Thin Films: Volume 239

Thin Films: Volume 239

Author: W. D. Nix

Publisher:

Published: 1992-06-16

Total Pages: 750

ISBN-13:

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Papers presented at the 1991 Fall Meeting of the Materials Research Society


Interlayer Dielectrics for Semiconductor Technologies

Interlayer Dielectrics for Semiconductor Technologies

Author: Shyam P Muraka

Publisher: Elsevier

Published: 2003-10-13

Total Pages: 459

ISBN-13: 0080521959

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Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challenges. Interlayer Dielectrics for Semiconductor Technologies cover the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation, followed by the discussion of different materials including those with high dielctric constants and those useful for waveguide applications in optical communications on the chip and the package.* Brings together for the FIRST time the science and technology of interlayer deilectrics materials, in one volume* written by renowned experts in the field* Provides an up-to-date starting point in this young research field.