Electron Beams, Lenses, and Optics
Electron Beams, Lenses, and Optics

Author: A El-Kareh

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 428

ISBN-13: 0323150772

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Electron Beams, Lenses, and Optics, Volume I deals with the physics of electron beams, lenses, and optics and covers topics ranging from the paraxial ray in symmetrical electric fields to the analytical determination of electrostatic fields. The general properties of electrostatic lenses and the electrostatic immersion lens are also considered. Each equation except one is derived from first principles. To emphasize the physics of the discussions, elementary mathematics is used as much as possible. Comprised of eight chapters, this volume begins with an introduction to the laws that govern electron beams and light rays, including Snell's law. Some fundamental limitations to the analogy between electron optics and light optics are evaluated, together with electron rays in plane symmetrical and in rotationally symmetrical fields. Subsequent chapters explore the general properties of electrostatic lenses and electrostatic immersion lenses; electrostatic unipotential lenses; and formation of optical images by rotationally symmetrical magnetic fields. The final chapter is devoted to the symmetrical magnetic lens and its magnetic scalar potential, paying particular attention to the flux density along the z axis and factors to consider in the design of the pole pieces. This book will be of interest to students, practitioners, and researchers in physics.

Electron Beams, Lenses, and Optics
Electron Beams, Lenses, and Optics

Author: A. B. El-Kareh

Publisher: Academic Press

Published: 2013-10-22

Total Pages: 335

ISBN-13: 1483271781

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Electron Beams, Lenses, and Optics, Volume 2 deals with the aberrations relating to electronic optics. This book discusses the geometrical aberrations of lenses; spherical aberration of electric and magnetic lenses; and measurement of the spherical aberration of various electric and magnetic lenses. The theory of diffraction; influence of space charge in high density electron beams; and chromatic aberration are also deliberated. This publication likewise covers the classification of the geometrical aberrations; derivation of the coefficient of spherical aberration according to Glaser; and pepper-pot method or Hartmann's test. The Fraunhofers diffraction through a circular aperture; force due to coulomb repulsion; and upper limit of the chromatic aberration of magnetic lenses are also included. This volume is valuable to industrial scientists and engineers concerned with electrostatic and magnetic lenses.

Principles of Electron Optics
Principles of Electron Optics

Author: Peter W. Hawkes

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 755

ISBN-13: 0080984169

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The three volumes in the PRINCIPLES OF ELECTRON OPTICS Series constitute the first comprehensive treatment of electron optics in over forty years. While Volumes 1 and 2 are devoted to geometrical optics, Volume 3 is concerned with wave optics and effects due to wave length. Subjects covered include:Derivation of the laws of electron propagation from SchrUdinger's equationImage formation and the notion of resolutionThe interaction between specimens and electronsImage processingElectron holography and interferenceCoherence, brightness, and the spectral functionTogether, these works comprise a unique and informative treatment of the subject. Volume 3, like its predecessors, will provide readers with both a textbook and an invaluable reference source.

Electron and Ion Optics
Electron and Ion Optics

Author: Miklos Szilagyi

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 550

ISBN-13: 1461309239

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The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Principles of Electron Optics, Volume 1
Principles of Electron Optics, Volume 1

Author: Peter W. Hawkes

Publisher: Elsevier

Published: 2017-10-29

Total Pages: 729

ISBN-13: 0081022573

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Volume one of Principles of Electron Optics: Basic Geometrical Optics, Second Edition, explores the geometrical optics needed to analyze an extremely wide range of instruments: cathode-ray tubes; the family of electron microscopes, including the fixed-beam and scanning transmission instruments, the scanning electron microscope and the emission microscope; electron spectrometers and mass spectrograph; image converters; electron interferometers and diffraction devices; electron welding machines; and electron-beam lithography devices. The book provides a self-contained, detailed, modern account of electron optics for anyone involved with particle beams of modest current density in the energy range up to a few mega-electronvolts. You will find all the basic equations with their derivations, recent ideas concerning aberration studies, extensive discussion of the numerical methods needed to calculate the properties of specific systems and guidance to the literature of all the topics covered. A continuation of these topics can be found in volume two, Principles of Electron Optics: Applied Geometrical Optics. The book is intended for postgraduate students and teachers in physics and electron optics, as well as researchers and scientists in academia and industry working in the field of electron optics, electron and ion microscopy and nanolithography. - Offers a fully revised and expanded new edition based on the latest research developments in electron optics - Written by the top experts in the field - Covers every significant advance in electron optics since the subject originated - Contains exceptionally complete and carefully selected references and notes - Serves both as a reference and text

Focusing of Charged Particles V2
Focusing of Charged Particles V2

Author: Albert Septier

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 487

ISBN-13: 0323148468

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Focusing of Charged Particles, Volume II presents the aspects of particle optics, including the electron, the ion optical domains, and the accelerator field. This book provides a detailed analysis of the principles of the laws of propagation of beams. Comprised of three parts encompassing three chapters, this volume starts with an overview of how a beam of charged particles traverses a region that is at a uniform, constant, electrostatic potential. This book then discusses the principle of charge repulsion effect by which the space charge of the beam modifies the potential in the region that it traverses. Other chapters examine the general design techniques and performances obtainable for electron guns applicable for use in initiating a beam for linear beam tubes that is given in a condensed form. The last chapter deals with the two stable charged particles that can be accelerated, namely, protons and electrons. This book is a valuable resource to physicists, accelerator experts, and experimenters in search of interactions in the detector target.

Applied Charged Particle Optics
Applied Charged Particle Optics

Author: Helmut Liebl

Publisher: Springer Science & Business Media

Published: 2008-01-12

Total Pages: 131

ISBN-13: 3540719253

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Written by a pioneer in the field, this overview of charged particle optics provides a solid introduction to the subject area for all physicists wishing to design their own apparatus or better understand the instruments with which they work. It begins by introducing electrostatic lenses and fields used for acceleration, focusing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement.

Magnetic Electron Lenses
Magnetic Electron Lenses

Author: P.W. Hawkes

Publisher: Springer Science & Business Media

Published: 2013-11-11

Total Pages: 474

ISBN-13: 3642815162

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No single volume has been entirely devoted to the properties of magnetic lenses, so far as I am aware, although of course all the numerous textbooks on electron optics devote space to them. The absence of such a volume, bringing together in formation about the theory and practical design of these lenses, is surprising, for their introduction some fifty years ago has created an entirely new family of commercial instruments, ranging from the now traditional transmission electron microscope, through the reflection and transmission scanning microscopes, to co lumns for micromachining and microlithography, not to mention the host of experi mental devices not available commercially. It therefore seemed useful to prepare an account of the various aspects of mag netic lens studies. These divide naturally into the five chapters of this book: the theoretical background, in which the optical behaviour is described and formu lae given for the various aberration coefficients; numerical methods for calculat ing the field distribution and trajectory tracing; extensive discussion of the paraxial optical properties and aberration coefficients of practical lenses, il lustrated with curves from which numerical information can be obtained; a comple mentary account of the practical, engineering aspects of lens design, including permanent magnet lenses and the various types of superconducting lenses; and final ly, an up-to-date survey of several kinds of highly unconventional magnetic lens, which may well change the appearance of future electron optical instruments very considerably after they cease to be unconventional.

Scanning Electron Microscopy
Scanning Electron Microscopy

Author: Ludwig Reimer

Publisher: Springer

Published: 2013-11-11

Total Pages: 538

ISBN-13: 3540389679

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Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

Geometrical Charged-Particle Optics
Geometrical Charged-Particle Optics

Author: Harald H. Rose

Publisher: Springer Science & Business Media

Published: 2009

Total Pages: 422

ISBN-13: 3540859152

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This resource covering all theoretical aspects of modern geometrical charged-particle optics is aimed at anyone involved in the design of electron optical instruments and beam-guiding systems for charged particles.