Electromechanics and MEMS
Author: Thomas B. Jones
Publisher: Cambridge University Press
Published: 2013-05-02
Total Pages: 581
ISBN-13: 0521764831
DOWNLOAD EBOOKA comprehensive MEMS textbook, with worked examples and numerous homework problems.
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Micro Electro Mechanical System Design
Author: James J. Allen
Publisher: CRC Press
Published: 2005-07-08
Total Pages: 492
ISBN-13: 1420027751
DOWNLOAD EBOOKIt is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
Electromechanics of Particles
Author: Thomas B. Jones
Publisher: Cambridge University Press
Published: 1995-10-27
Total Pages: 289
ISBN-13: 0521431964
DOWNLOAD EBOOKSmall particles in the size range from one micron to one millimetre are increasingly important in today's technological world. They serve as workhorses in many mechanisms and devices - from electrostatic copiers to fluidised beds. A more recent development involves the characterisation and manipulation of individual cells and DNA molecules. Particulates can also be a hazard, for example, particulate pollution. Because all particles have electrical and magnetic properties associated with their shape and the materials of which they are constituted, they experience forces and torques when subjected to electric and/or magnetic fields. This book offers a lucid account of the electromechanical interactions that govern the behaviour of particles when an electric or magnetic field is present. With numerous real-world examples, the book should interest a wide range of scientists and engineers.
The Design of High Performance Mechatronics - 2nd Revised Edition
Author: R. Munnig Schmidt
Publisher: IOS Press
Published: 2014-01-08
Total Pages: 928
ISBN-13: 1614993688
DOWNLOAD EBOOKSince they entered our world around the middle of the 20th century, the application of mechatronics has enhanced our lives with functionality based on the integration of electronics, control systems and electric drives. This book deals with the special class of mechatronics that has enabled the exceptional levels of accuracy and speed of high-tech equipment applied in the semiconductor industry, realising the continuous shrink in detailing of micro-electronics and MEMS. As well as the more frequently presented standard subjects of dynamics, motion control, electronics and electromechanics, this book includes an overview of systems engineering, optics and precision measurement systems, in an attempt to establish a connection between these fields under one umbrella. Robert Munnig Schmidt is professor in Mechatronic System Design at Delft University of Technology with industrial experience at Philips and ASML in research and development of consumer and high-tech systems. He is also director of RMS Acoustics & Mechatronics, doing research and development on active controlled low frequency sound systems. Georg Schitter is professor at the Automation and Control Institute (ACIN) at Vienna University of Technology with a standing track record in research on the control and mechatronic design of extremely fast precision motion systems such as video rate AFM systems. Adrian Rankers is managing partner of Mechatronics Academy, developing and delivering high level courses to the industrial community, based on industrial experience at Philips in the research and development of consumer and high-tech systems. Jan van Eijk is emeritus professor in Advanced Mechatronics at Delft University of Technology. He is also director of MICE BV and partner at Mechatronics Academy, acting as industrial R&D advisor and teacher with experience at Philips in the research and development of consumer and high-tech systems.
Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies
Author: Kenichi Takahata
Publisher: BoD – Books on Demand
Published: 2013-05-29
Total Pages: 238
ISBN-13: 9535110853
DOWNLOAD EBOOKMEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.
Multi-Wafer Rotating MEMS Machines
Author: Jeffrey Lang
Publisher: Springer Science & Business Media
Published: 2009-09-18
Total Pages: 469
ISBN-13: 0387777474
DOWNLOAD EBOOKThe collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Mechanical Microsensors
Author: M. Elwenspoek
Publisher: Springer Science & Business Media
Published: 2012-12-06
Total Pages: 306
ISBN-13: 3662043211
DOWNLOAD EBOOKThis book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Understanding Electro-Mechanical Engineering
Author: Lawrence J. Kamm
Publisher: John Wiley & Sons
Published: 1995-09-05
Total Pages: 420
ISBN-13: 9780780310315
DOWNLOAD EBOOKWith a focus on electromechanical systems in a variety of fields, this accessible introductory text brings you coverage of the full range of electrical mechanical devices used today. You'll gain a comprehensive understanding of the design process and get valuable insights into good design practice. UNDERSTANDING ELECTROMECHANICAL ENGINEERING will be of interest to anyone in need of a non-technical, interdisciplinary introduction to the thriving field of mechatronics.
MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publisher: SPIE Press
Published: 2000
Total Pages: 544
ISBN-13: 9780819437167
DOWNLOAD EBOOKThe silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
MEMS: Field Models and Optimal Design
Author: Paolo Di Barba
Publisher: Springer
Published: 2019-06-26
Total Pages: 191
ISBN-13: 3030214966
DOWNLOAD EBOOKThis book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.
