Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: Elsevier

Published: 2020-04-17

Total Pages: 1028

ISBN-13: 012817787X

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Piezoelectric MEMS Resonators
Piezoelectric MEMS Resonators

Author: Harmeet Bhugra

Publisher: Springer

Published: 2017-01-09

Total Pages: 423

ISBN-13: 3319286889

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Wireless Radio-Frequency Standards and System Design: Advanced Techniques
Wireless Radio-Frequency Standards and System Design: Advanced Techniques

Author: Cornetta, Gianluca

Publisher: IGI Global

Published: 2012-01-31

Total Pages: 358

ISBN-13: 1466600845

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Radio-frequency (RF) integrated circuits in CMOS technology are gaining increasing popularity in the commercial world, and CMOS technology has become the dominant technology for applications such as GPS receivers, GSM cellular transceivers, wireless LAN, and wireless short-range personal area networks based on IEEE 802.15.1 (Bluetooth) or IEEE 802.15.4 (ZigBee) standards. Furthermore, the increasing interest in wireless technologies and the widespread of wireless communications has prompted an ever increasing demand for radio frequency transceivers. Wireless Radio-Frequency Standards and System Design: Advanced Techniques provides perspectives on radio-frequency circuit and systems design, covering recent topics and developments in the RF area. Exploring topics such as LNA linearization, behavioral modeling and co-simulation of analog and mixed-signal complex blocks for RF applications, integrated passive devices for RF-ICs and baseband design techniques and wireless standards, this is a comprehensive reference for students as well as practicing professionals.

Temperature- and Supply Voltage-Independent Time References for Wireless Sensor Networks
Temperature- and Supply Voltage-Independent Time References for Wireless Sensor Networks

Author: Valentijn De Smedt

Publisher: Springer

Published: 2014-11-07

Total Pages: 422

ISBN-13: 3319090038

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This book investigates the possible circuit solutions to overcome the temperature and supply voltage-sensitivity of fully-integrated time references for ultra-low-power communication in wireless sensor networks. The authors provide an elaborate theoretical introduction and literature study to enable full understanding of the design challenges and shortcomings of current oscillator implementations. Furthermore, a closer look to the short-term as well as the long-term frequency stability of integrated oscillators is taken. Next, a design strategy is developed and applied to 5 different oscillator topologies and 1 sensor interface. All 6 implementations are subject to an elaborate study of frequency stability, phase noise and power consumption. In the final chapter all blocks are compared to the state of the art.

Understanding Jitter and Phase Noise
Understanding Jitter and Phase Noise

Author: Nicola Da Dalt

Publisher: Cambridge University Press

Published: 2018-02-22

Total Pages: 270

ISBN-13: 131699306X

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Gain an intuitive understanding of jitter and phase noise with this authoritative guide. Leading researchers provide expert insights on a wide range of topics, from general theory and the effects of jitter on circuits and systems, to key statistical properties and numerical techniques. Using the tools provided in this book, you will learn how and when jitter and phase noise occur, their relationship with one another, how they can degrade circuit performance, and how to mitigate their effects - all in the context of the most recent research in the field. Examine the impact of jitter in key application areas, including digital circuits and systems, data converters, wirelines, and wireless systems, and learn how to simulate it using the accompanying Matlab code. Supported by additional examples and exercises online, this is a one-stop guide for graduate students and practicing engineers interested in improving the performance of modern electronic circuits and systems.

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV

Author: Danelle Mary Tanner

Publisher: SPIE-International Society for Optical Engineering

Published: 2005

Total Pages: 272

ISBN-13: 9780819456908

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Radio-Frequency Integrated-Circuit Engineering
Radio-Frequency Integrated-Circuit Engineering

Author: Cam Nguyen

Publisher: John Wiley & Sons

Published: 2015-03-04

Total Pages: 884

ISBN-13: 1118900472

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Radio-Frequency Integrated-Circuit Engineering addresses the theory, analysis and design of passive and active RFIC's using Si-based CMOS and Bi-CMOS technologies, and other non-silicon based technologies. The materials covered are self-contained and presented in such detail that allows readers with only undergraduate electrical engineering knowledge in EM, RF, and circuits to understand and design RFICs. Organized into sixteen chapters, blending analog and microwave engineering, Radio-Frequency Integrated-Circuit Engineering emphasizes the microwave engineering approach for RFICs. * Provides essential knowledge in EM and microwave engineering, passive and active RFICs, RFIC analysis and design techniques, and RF systems vital for RFIC students and engineers * Blends analog and microwave engineering approaches for RFIC design at high frequencies * Includes problems at the end of each chapter