Characterization of DC Reactive Sputtered Indium Tin Oxide Thin Films

Characterization of DC Reactive Sputtered Indium Tin Oxide Thin Films

Author: Philip Infante

Publisher:

Published: 1994

Total Pages: 212

ISBN-13:

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Indium tin oxide (ITO) is a widely used transparent conductor due to its ability to ofer higher conductance and better etch ability over other transparent conductors. ITO has been utilized as transparent electrodes in liquid crystal displays and heterojunction solar cells, as transparent heat reflecting films, as the sensing medium in gas sensors, and in optoelectronic device applications. In general, these films are characterized by high transparency in the visible spectra, high reflectance in the IR and absorption in the UV regions, and near metallic conductivity.


Optoelectronics

Optoelectronics

Author: Sergei Pyshkin

Publisher: BoD – Books on Demand

Published: 2017-07-12

Total Pages: 374

ISBN-13: 9535133691

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Optoelectronics - Advanced Device Structures (Book IV) is following the Optoelectronics (Books I, II, and III) published in 2011, 2013, and 2015, as part of the InTech collection of international works on optoelectronics. Accordingly, as with the first three books of the collection, this book covers recent achievements by specialists around the world. The growing number of countries participating in this endeavor as well as joint participation of the US and Moldova scientists in edition of this book testifies to the unifying effect of science. An interested reader will find in the book the description of properties and applications employing organic and inorganic materials, as well as the methods of fabrication and analysis of operation and regions of application of modern optoelectronic devices.


Sputtering Materials for VLSI and Thin Film Devices

Sputtering Materials for VLSI and Thin Film Devices

Author: Jaydeep Sarkar

Publisher: William Andrew

Published: 2010-12-13

Total Pages: 614

ISBN-13: 0815519877

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An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry


Reactive Sputter Deposition

Reactive Sputter Deposition

Author: Diederik Depla

Publisher: Springer Science & Business Media

Published: 2008-06-24

Total Pages: 584

ISBN-13: 3540766642

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In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.


The 30th SIAR International Congress of Automotive and Transport Engineering

The 30th SIAR International Congress of Automotive and Transport Engineering

Author: Ilie Dumitru

Publisher: Springer Nature

Published: 2019-10-15

Total Pages: 715

ISBN-13: 3030325644

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This proceedings book includes papers that cover the latest developments in automotive vehicles and environment, advanced transport systems and road traffic, heavy and special vehicles, new materials, manufacturing technologies and logistics and advanced engineering methods. Authors of the papers selected for this book are experts from research, industry and universities, coming from different countries. The overall objectives of the presentations are to respond to the major challenges faced by the automotive industry, and to propose potential solutions to problems related to automotive technology, transportation and environment, and road safety. The congress is organized by SIAR (Society of Automotive Engineers from Romania) in cooperation with SAE International. The purpose is to gather members from academia, industry and government and present their possibilities for investigations and research, in order to establish new future collaborations in the automotive engineering and transport domain. This proceedings book is just a part of the outcomes of the congress. The results presented in this proceedings book benefit researchers from academia and research institutes, industry specialists, Ph.D. students and students in Automotive and Transport Engineering programs.


Fiber Optic Sensors

Fiber Optic Sensors

Author: Ignacio R. Matias

Publisher: Springer

Published: 2016-11-01

Total Pages: 379

ISBN-13: 3319426257

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This book describes important recent developments in fiber optic sensor technology and examines established and emerging applications in a broad range of fields and markets, including power engineering, chemical engineering, bioengineering, biomedical engineering, and environmental monitoring. Particular attention is devoted to niche applications where fiber optic sensors are or soon will be able to compete with conventional approaches. Beyond novel methods for the sensing of traditional parameters such as strain, temperature, and pressure, a variety of new ideas and concepts are proposed and explored. The significance of the advent of extended infrared sensors is discussed, and individual chapters focus on sensing at THz frequencies and optical sensing based on photonic crystal structures. Another important topic is the resonances generated when using thin films in conjunction with optical fibers, and the enormous potential of sensors based on lossy mode resonances, surface plasmon resonances, and long-range surface exciton polaritons. Detailed attention is also paid to fiber Bragg grating sensors and multimode interference sensors. Each chapter is written by an acknowledged expert in the subject under discussion.