Advanced Technologies Based on Wave and Beam Generated Plasmas
Author: H. Schlüter
Publisher: Springer Science & Business Media
Published: 2013-06-29
Total Pages: 580
ISBN-13: 9401706336
DOWNLOAD EBOOKThis book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas