A High Aspect-ratio High-performance Polysilicon Vibrating Ring Gyroscope
Author: Farrokh Ayazi
Publisher:
Published: 2000
Total Pages: 264
ISBN-13:
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A High Aspect-ratio High-performance Polysilicon Vibrating Ring Gyroscope
Author: Farrokh Ayazi
Publisher:
Published: 2006
Total Pages:
ISBN-13:
DOWNLOAD EBOOKMEMS
Author: Vikas Choudhary
Publisher: CRC Press
Published: 2017-12-19
Total Pages: 481
ISBN-13: 135183228X
DOWNLOAD EBOOKThe microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Whole-Angle MEMS Gyroscopes
Author: Doruk Senkal
Publisher: John Wiley & Sons
Published: 2020-06-16
Total Pages: 176
ISBN-13: 1119441889
DOWNLOAD EBOOKPresents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.
Circuits at the Nanoscale
Author: Krzysztof Iniewski
Publisher: CRC Press
Published: 2018-10-08
Total Pages: 669
ISBN-13: 1351834657
DOWNLOAD EBOOKCircuits for Emerging Technologies Beyond CMOS New exciting opportunities are abounding in the field of body area networks, wireless communications, data networking, and optical imaging. In response to these developments, top-notch international experts in industry and academia present Circuits at the Nanoscale: Communications, Imaging, and Sensing. This volume, unique in both its scope and its focus, addresses the state-of-the-art in integrated circuit design in the context of emerging systems. A must for anyone serious about circuit design for future technologies, this book discusses emerging materials that can take system performance beyond standard CMOS. These include Silicon on Insulator (SOI), Silicon Germanium (SiGe), and Indium Phosphide (InP). Three-dimensional CMOS integration and co-integration with Microelectromechanical (MEMS) technology and radiation sensors are described as well. Topics in the book are divided into comprehensive sections on emerging design techniques, mixed-signal CMOS circuits, circuits for communications, and circuits for imaging and sensing. Dr. Krzysztof Iniewski is a director at CMOS Emerging Technologies, Inc., a consulting company in Vancouver, British Columbia. His current research interests are in VLSI ciruits for medical applications. He has published over 100 research papers in international journals and conferences, and he holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. In this volume, he has assembled the contributions of over 60 world-reknown experts who are at the top of their field in the world of circuit design, advancing the bank of knowledge for all who work in this exciting and burgeoning area.
Guide to State-of-the-Art Electron Devices
Author: Joachim N. Burghartz
Publisher: John Wiley & Sons
Published: 2013-03-19
Total Pages: 637
ISBN-13: 1118517539
DOWNLOAD EBOOKWinner, 2013 PROSE Award, Engineering and Technology Concise, high quality and comparative overview of state-of-the-art electron device development, manufacturing technologies and applications Guide to State-of-the-Art Electron Devices marks the 60th anniversary of the IRE electron devices committee and the 35th anniversary of the IEEE Electron Devices Society, as such it defines the state-of-the-art of electron devices, as well as future directions across the entire field. Spans full range of electron device types such as photovoltaic devices, semiconductor manufacturing and VLSI technology and circuits, covered by IEEE Electron and Devices Society Contributed by internationally respected members of the electron devices community A timely desk reference with fully-integrated colour and a unique lay-out with sidebars to highlight the key terms Discusses the historical developments and speculates on future trends to give a more rounded picture of the topics covered A valuable resource R&D managers; engineers in the semiconductor industry; applied scientists; circuit designers; Masters students in power electronics; and members of the IEEE Electron Device Society.
Aerospace Sensors
Author: Alexander Nebylov
Publisher: Momentum Press
Published: 2012-11-20
Total Pages: 378
ISBN-13: 1606500619
DOWNLOAD EBOOKModern air and space craft demand a huge variety of sensing elements for detecting and controlling their behavior and operation. These sensors often differ significantly from those designed for applications in automobile, ship, railway, and other forms of transportation, and those used in industrial, chemical, medical, and other areas. This book offers insight into an appropriate selection of these sensors and describes their principles of operation, design, and achievable performance along with particulars of their construction. Drawn from the activities of the International Federation of Automatic Control (IFAC), especially its Aerospace Technical Committee, the book provides details on the majority of sensors for aircraft and many for spacecraft, satellites, and space probes. It is written by an international team of twelve authors representing four countries from Eastern and Western Europe and North America, all with considerable experience in aerospace sensor and systems design. Highlights include: • coverage of aerospace vehicle classification, specific design criteria, and the requirements of onboard systems and sensors; • reviews of airborne flight parameter sensors, weather sensors and collision avoidance devices; • discussions on the important role of inertial navigation systems (INS) and separate gyroscopic sensors for aerospace vehicle navigation and motion control; • descriptions of engine parameter information collection systems, including fuel quantity and consumption sensors, pressure pick-ups, tachometers, vibration control, and temperature sensors; and • descriptions and examples of sensor integration.
MEMS/NEMS Sensors
Author: Goutam Koley
Publisher: MDPI
Published: 2019-11-20
Total Pages: 242
ISBN-13: 3039216341
DOWNLOAD EBOOKDue to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.
MEMS
Author: Mohamed Gad-el-Hak
Publisher: CRC Press
Published: 2005-11-29
Total Pages: 576
ISBN-13: 1420036556
DOWNLOAD EBOOKAs our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Scaling Issues and Design of MEMS
Author: Salvatore Baglio
Publisher: John Wiley & Sons
Published: 2008-07-31
Total Pages: 244
ISBN-13: 9780470034088
DOWNLOAD EBOOKThis accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including: temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple; mechanical sensors; inductive microsensors for the detection of magnetic particles; electrostatic, thermal and magnetic actuators. With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the importantissue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots. Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.
