The Structural and Electrical Properties of Thin Films Sputtered from a Platinum Cathode in Argon-oxygen Mixtures
Author: Carl David Bennewitz
Publisher:
Published: 1974
Total Pages: 216
ISBN-13:
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Post-processing Techniques for Integrated MEMS
Author: Sherif Sedky
Publisher: Artech House Publishers
Published: 2006
Total Pages: 232
ISBN-13:
DOWNLOAD EBOOKThis groundbreaking resource presents cutting-edge post-processing techniques for the monolithic integration of MEMS. You learn how to select MEMS structural layers that can be processed on top of standard pre-fabricated electronics and will optimize the performance and reliability of the MEMS device. Supported with over 240 illustrations, the book details a modular integration process that won't modify the electronics fabrication process or impose any limitation for optimizing the physical properties of the MEMS structural layers.
Research on Vacuum Evaporated and Cathode Sputtered Thin Films
Author: Richard B. Belser
Publisher:
Published: 1963
Total Pages: 128
ISBN-13:
DOWNLOAD EBOOKElectronic Properties Research Literature Retrieval Guide, 1972-1976: Elements
Author: Purdue University. Center for Information and Numerical Data Analysis and Synthesis
Publisher: Ifi/Plenum
Published: 1979
Total Pages: 522
ISBN-13:
DOWNLOAD EBOOKThe Structural, Optical, and Electrical Properties of RF Sputtered (Hg0 --5Cd0 25)Te Thin Films
Author: Philip William Diodato
Publisher:
Published: 1980
Total Pages: 348
ISBN-13:
DOWNLOAD EBOOKBTL Talks and Papers
Author: Bell Telephone Laboratories, inc. Technical Information Libraries
Publisher:
Published: 1980
Total Pages: 508
ISBN-13:
DOWNLOAD EBOOKBell Laboratories Talks and Papers
Author: Bell Telephone Laboratories. Libraries and Information Systems Center
Publisher:
Published: 1980
Total Pages: 508
ISBN-13:
DOWNLOAD EBOOKJapanese Journal of Applied Physics
Author:
Publisher:
Published: 1994
Total Pages: 1792
ISBN-13:
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