The Physics of Micro/Nano-Fabrication

The Physics of Micro/Nano-Fabrication

Author: Ivor Brodie

Publisher: Springer Science & Business Media

Published: 2013-06-29

Total Pages: 661

ISBN-13: 1475767757

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.