Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Author: Jerzy Rużyłło
Publisher: The Electrochemical Society
Published: 1998
Total Pages: 668
ISBN-13: 9781566771887
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Author: Jerzy Rużyłło
Publisher: The Electrochemical Society
Published: 1998
Total Pages: 668
ISBN-13: 9781566771887
DOWNLOAD EBOOKAuthor: Richard E. Novak
Publisher: The Electrochemical Society
Published: 1996
Total Pages: 642
ISBN-13: 9781566771153
DOWNLOAD EBOOKAuthor: Jerzy Rużyłło
Publisher: The Electrochemical Society
Published: 2004
Total Pages: 452
ISBN-13: 9781566774116
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Publisher:
Published: 2003
Total Pages: 458
ISBN-13:
DOWNLOAD EBOOKAuthor: Jerzy Ruzyllo
Publisher:
Published: 1990
Total Pages: 399
ISBN-13:
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Publisher: The Electrochemical Society
Published: 2000
Total Pages: 636
ISBN-13: 9781566772594
DOWNLOAD EBOOKAuthor: Jerzy Rużyłło
Publisher:
Published: 2002
Total Pages: 374
ISBN-13: 9781566773591
DOWNLOAD EBOOKAuthor: Karen Reinhardt
Publisher: William Andrew
Published: 2018-03-16
Total Pages: 794
ISBN-13: 032351085X
DOWNLOAD EBOOKHandbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal aspects. This revised edition includes the developments of the last ten years to accommodate a continually involving industry, addressing new technologies and materials, such as germanium and III-V compound semiconductors, and reviewing the various techniques and methods for cleaning and surface conditioning. Chapters include numerous examples of cleaning technique and their results. The book helps the reader understand the process they are using for their cleaning application and why the selected process works. For example, discussion of the mechanism and physics of contamination, metal, particle and organic includes information on particle removal, metal passivation, hydrogen-terminated silicon and other processes that engineers experience in their working environment. In addition, the handbook assists the reader in understanding analytical methods for evaluating contamination. The book is arranged in an order that segments the various cleaning techniques, aqueous and dry processing. Sections include theory, chemistry and physics first, then go into detail for the various methods of cleaning, specifically particle removal and metal removal, amongst others. Focuses on cleaning techniques including wet, plasma and other surface conditioning techniques used to manufacture integrated circuits Reliable reference for anyone that manufactures integrated circuits or supplies the semiconductor and microelectronics industries Covers processes and equipment, as well as new materials and changes required for the surface conditioning process
Author: Jerzy Rużyłło
Publisher:
Published: 1994
Total Pages: 604
ISBN-13: 9781566770385
DOWNLOAD EBOOKAuthor: Jerzy Rużyłło
Publisher:
Published: 1992
Total Pages: 502
ISBN-13: 9781566770125
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