Plasma etching was investigated using NF3 mixtures to generate a low-pressure reactive plasma. Nitrogen trifluoride was mixed with combinations of argon, CF2Cl2 or chlorine. Plasma pressure, power density and chemical composition were varied. Silicon and silicon dioxide reaction rates and silicon to silicon dioxide reaction selectivity were established. The etch anisotropy obtained from a patterning process was also investigated.
The Complete Book on Industrial Gases (Acetylene, Argon, Butane, Butene, Carbon Dioxide, Carbon Monoxide, Ethane, Ethene, Helium, Hydrogen Chloride, Hydrogen, Krypton, Liquefied Natural Gas (LNG), Methane, Neon, Nitrogen, Nitrogen Trifluoride Gas, Nitrous Oxide, Oxygen, Ozone, Propane, Propene, Refrigerant Gases, Sulphur Dioxide Gas, Sulphur Hexafluoride Gas, Xenon, Gas Mixtures with Machinery Equipment Details and Factory Layout) Industrial gases are gases that are produced for use in industrial processes. These gases are used in a wide range of industries, including manufacturing, healthcare, electronics, food and beverage, and many more. They are utilized in different forms, such as pure gases, gas mixtures, and liquid gases, depending on the specific application. Industrial gases can be classified into several categories based on their properties and applications. One of the most common types is atmospheric gases, which are gases that exist naturally in the Earth's atmosphere. This category includes gases such as nitrogen, oxygen, and argon, which are widely used in various industries. The global industrial gases market size was valued at USD 99.99 billion and is expected to grow at a compound annual growth rate (CAGR) of 7.42%. The growing demand for industrial gases from food & beverages, electronics, and healthcare sectors is driving the global market growth. There are untapped opportunities for market players operating in the industrial gases market due to surging demand for industrial gases in emergency medical conditions. Moreover, due to the rapid spread of manufacturing and processing industries across the globe, market players are expected to invest towards production expansion to expand the market share, hence providing growth opportunities in the upcoming years. Steel, glass, oil, and fiber optics segments demand intensive usage of industrial gases. Growth and advancement in these sectors in developing countries is contributing to the rapid expansion of the industrial gases market. This book is dedicated to the Gases Industry, the details of gases properties, methods and applications are given. The book sheds light on the materials required for the same and the various processes involved. This popular book has been organized to provide readers with a firmer grasp of how gas technologies are revolutionizing the industry. The major content of the book are Acetylene, Ammonia, Argon, Butane, Butene, Carbon Dioxide, Carbon Monoxide, Ethane, Ethene, Helium, Hydrogen Chloride, Hydrogen, Krypton, Liquefied Natural Gas (LNG), Methane, Neon, Nitrogen, Nitrogen Trifluoride Gas, Nitrous Oxide, Oxygen, Ozone, Propane, Propene, Refrigerant Gases, Sulphur Dioxide Gas, Sulphur Hexafluoride Gas, Xenon, Gas Mixtures (Breathing, Forming, Penning, Shielding) photographs of machinery with suppliers contact details. A total guide to manufacturing and entrepreneurial success in one of today's most Industrial Gases industry. This book is a one-stop guide to one of the fastest growing sectors of the Industrial Gases industry, where opportunities abound for manufacturers, retailers, and entrepreneurs. This is the only complete book on the commercial production of Industrial Gases. It serves up a feast of how-to information, from concept to purchasing equipment.
The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Masters Theses in the Pure and Applied Sciences was first conceived, published, SIld disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS) * at Purdue University in 1957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all con cerned if the printing and distribution of the volumes were handled by an interna and broader dissemination. tional publishing house to assure improved service Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Cor poration of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 30 (thesis year 1985) a total of 12,400 theses titles from 26 Canadian and 186 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this important annual reference work.
In the field of compressed gases and related equipment, there is an expanding core of essential knowledge that people handling and using these materials should be familiar with or should know where to find. The focus ofthis book concerns the properties and the accepted means oftransportation, storage, and handlingofcompressed gases. This handbook is simultaneously intended as an overview ofthe subject and a source ofsupplementary information. It is also intended to serve as a guide to perti nent federal regulatory requirements and published standards of the Compressed Gas Association and other standards-developing organizations. The Association advises readers that the CGA technical publications remain the official statement ofpolicy on a particular matter. Reference is made throughout this text to the numerous technical publications published by the Compressed Gas Association. Some ofthese publications have been incorporated by reference into federal, state, provincial, and local regulations. Since the CGA publications are reviewed on a periodic basis, whenever the textofthis handbook conflicts with corresponding information in the CGA technical pamphlets, the most recently printed material shall take precedence.
During the past fifteen years commercial interest in compounds containing carbon fluorine bonds has burgeoned beyond all expectations, mainly owing to business opportunities arising from work on biologically active fluoroorganics-particularly agrochemicals, the relentless search for new markets for fluoropolymers and fluoro carbon fluids, developments in the field of medical diagnostics, and the drive to find replacements for ozone-depleting CFCs and Halon fire-extinguishing agents. Judging the situation to warrant the publication of a comprehensive collection of up-to-date reviews dealing with commercial organofluorine compounds within a single volume of manageable size (and hence reasonable cost), we were delighted to be invited by Plenum Publishing Corporation to produce a suitable book. In order to provide an authentic and wide-ranging account of current commercial applications of fluoroorganic materials, it clearly was necessary to assemble a sizeable team of knowledgeable contributing authors selected almost entirely from industry. Through their efforts we have been able to produce an almost complete coverage of the modem organofluorochemicals business in a manner designed to attract a reader ship ranging from experts in the field, through chemists and technologists currently unaware of the extent of industrial involvement with fluoroorganics, to students of applied chemistry. Promised chapters dedicated to perfluoroolefin oxides and 18F labeling of radiopharmaceuticals failed to materialize. This is somewhat unfortunate in view of our aim to achieve comprehensive coverage of the subject.
