This book describes the application of piezoelectric materials, particularly piezoceramics, in the wide field of actuators and sensors. It gives a step-by-step introduction to the structure and mechanics of piezoelectric beam bending actuators in multilayer technology, which are of increasing importance for industrial applications. The book presents the suitability of the developed theoretical aspects in a memorable way.
This book describes the application of piezoelectric materials, particularly piezoceramics, in the wide field of actuators and sensors. It gives a step-by-step introduction to the structure and mechanics of piezoelectric beam bending actuators in multilayer technology, which are of increasing importance for industrial applications. The book presents the suitability of the developed theoretical aspects in a memorable way.
Piezoelectric Actuators: Vector Control Method: Base, Modeling and Mechatronic Design of Ultrasonic Devices guides researchers and engineers through the process of implementing the vector control method (VCM) in their systems. The book presents which measurements can be made, how to visualize a variable as a rotating vector, about the angular position of the rotating reference frame, how to calculate the parameters of the controllers, and how to observe key variables. Additionally, the book focuses on the modeling of PE ultrasonic transducers and investigates the energy conversion process in an ultrasonic transducer.
In this greatly reworked second edition of Engineering Haptic Devices the psychophysic content has been thoroughly revised and updated. Chapters on haptic interaction, system structures and design methodology were rewritten from scratch to include further basic principles and recent findings. New chapters on the evaluation of haptic systems and the design of three exemplary haptic systems from science and industry have been added. This book was written for students and engineers that are faced with the development of a task-specific haptic system. It is a reference book for the basics of haptic interaction and existing haptic systems and methods as well as an excellent source of information for technical questions arising in the design process of systems and components. Divided into two parts, part 1 contains typical application areas of haptic systems and a thorough analysis of haptics as an interaction modality. The role of the user in the design of haptic systems is discussed and relevant design and development stages are outlined. Part II presents all relevant problems in the design of haptic systems including general system and control structures, kinematic structures, actuator principles and sensors for force and kinematic measures. Further chapters examine interfaces and software development for virtual reality simulations.
Smart Materials-Based Actuators at the Micro/Nano-Scale: Characterization, Control, and Applications gives a state of the art of emerging techniques to the characterization and control of actuators based on smart materials working at the micro/nano scale. The book aims to characterize some commonly used structures based on piezoelectric and electroactive polymeric actuators and also focuses on various and emerging techniques employed to control them. This book also includes two of the most emerging topics and applications: nanorobotics and cells micro/nano-manipulation.
“Piezoelectric-Based Vibration-control Systems: Applications in Micro/Nano Sensors and Actuators” covers: Fundamental concepts in smart (active) materials including piezoelectric and piezoceramics, magnetostrictive, shape-memory materials, and electro/magneto-rheological fluids; Physical principles and constitutive models of piezoelectric materials; Piezoelectric sensors and actuators; Fundamental concepts in mechanical vibration analysis and control with emphasis on distributed-parameters and vibration-control systems; and Recent advances in piezoelectric-based microelectromechanical and nanoelectromechanical systems design and implementation.
This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.
Dieses Handbuch erörtert den aktuellen Stand der Technik bei Faserstoffen und bietet einen breiten Überblick über deren Einsatz in Forschung und Entwicklung. Herausgeber ist ein führender Experte des Fachgebiets. Abhandlungen stammen von erfahrenen Forschern im Bereich Fasern und Textilien. Band 1 legt den Schwerpunkt auf Faserklassen, die Herstellung und Charakterisierung von Fasern. Band 2 stellt Anwendungen vor, darunter auch neue Anwendungen aus den Bereichen Energie, Umweltwissenschaften und Gesundheitswesen. Ein hochaktuelles Fachbuch und einzigartiges Wissenskompendium für Hochschule und Industrie.
Smart Composites: Mechanics and Design addresses the current progress in the mechanics and design of smart composites and multifunctional structures. Divided into three parts, it covers characterization of properties, analyses, and design of various advanced composite material systems with an emphasis on the coupled mechanical and non-mechanical be
The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.
