Physics and Technology of High-k Gate Dielectrics 4
Author: Samares Kar
Publisher: The Electrochemical Society
Published: 2006
Total Pages: 565
ISBN-13: 1566775035
DOWNLOAD EBOOKThis issue covers, in detail, all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.