Optical Spectroscopy Studies of the Reactive Ion Etching of Gallium Arsenide in Dichlorodifloromethane/oxygen/argon Discharges
Author: Hakki Ufuk Alpay
Publisher:
Published: 1984
Total Pages: 108
ISBN-13:
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Optical Spectroscopy Studies of the Reactive Ion Etching of Silicon and Gallium Arsenide in Halomethane-based Discharges
Author: Robert Edward Klinger
Publisher:
Published: 1982
Total Pages: 244
ISBN-13:
DOWNLOAD EBOOKPredictable Reactive Ion Etching of Gallium Arsenide and Aluminum Gallium Arsenide in Hydrogen Chloride/argon Radio Frequency Discharges
Author: Karen Jean Nordheden
Publisher:
Published: 1988
Total Pages: 106
ISBN-13:
DOWNLOAD EBOOKOptical Spectroscopy Studies of Ion Bombarded Gallium Arsenide and Vanadium Carbide Thin Films
Author: Kudakwashe Jakata
Publisher:
Published: 2018
Total Pages: 168
ISBN-13:
DOWNLOAD EBOOKGlow Discharge Optical Spectroscopy of ION Implanted Gallium Arsenide
Author: Suk Puangthum (2LT, RTAF.)
Publisher:
Published: 1979
Total Pages: 150
ISBN-13:
DOWNLOAD EBOOKGlow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide
Author: Kenneth R. Williamson (CAPT, USAF.)
Publisher:
Published: 1978
Total Pages: 128
ISBN-13:
DOWNLOAD EBOOKGlow Discharge Optical Spectroscopy of Ion Implanted Gallium Arsenide
Author: Kenneth R. Williamson
Publisher:
Published: 1978
Total Pages: 86
ISBN-13:
DOWNLOAD EBOOKGlow Discharge Optical Spectroscopy (GDOS) was used as a technique for obtaining impurity concentration profiles of annealed and unannealed ion implanted GaAs samples. Germanium, magnesium, and boron ions were implanted at energies of 60keV or 120keV and fluences of 1 or 5 times 10 to the 15th power/sq.cm. The samples were sputtered in a dc glow discharge. The intensities of strong emission lines (proportional to concentration) were calibrated using pure elements as standards, providing impurity concentration profiles. (Author).
A Study of Reactive Ion Etching of Gallium Arsenide in Mixtures of Methane and Hydrogen Plasmas
Author: Hossein Fariborz Sahafi
Publisher:
Published: 1992
Total Pages:
ISBN-13:
DOWNLOAD EBOOKSelective and Non-selective Reactive Ion Etching of Gallium Arsenide and Aluminum Gallium Arsenide
Author: Dennis J. Yost
Publisher:
Published: 1989
Total Pages: 164
ISBN-13:
DOWNLOAD EBOOKThe Study of Surface Damage of Gallium Arsenide Induced by Reactive Ion Etching
Author: Mark Stephen Puttock
Publisher:
Published: 1990
Total Pages:
ISBN-13:
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