Optical Characterization of Epitaxial Semiconductor Layers

Optical Characterization of Epitaxial Semiconductor Layers

Author: Günther Bauer

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 446

ISBN-13: 3642796788

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The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.


Heteroepitaxy of Semiconductors

Heteroepitaxy of Semiconductors

Author: John E. Ayers

Publisher: CRC Press

Published: 2018-10-08

Total Pages: 388

ISBN-13: 135183780X

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Heteroepitaxy has evolved rapidly in recent years. With each new wave of material/substrate combinations, our understanding of how to control crystal growth becomes more refined. Most books on the subject focus on a specific material or material family, narrowly explaining the processes and techniques appropriate for each. Surveying the principles common to all types of semiconductor materials, Heteroepitaxy of Semiconductors: Theory, Growth, and Characterization is the first comprehensive, fundamental introduction to the field. This book reflects our current understanding of nucleation, growth modes, relaxation of strained layers, and dislocation dynamics without emphasizing any particular material. Following an overview of the properties of semiconductors, the author introduces the important heteroepitaxial growth methods and provides a survey of semiconductor crystal surfaces, their structures, and nucleation. With this foundation, the book provides in-depth descriptions of mismatched heteroepitaxy and lattice strain relaxation, various characterization tools used to monitor and evaluate the growth process, and finally, defect engineering approaches. Numerous examples highlight the concepts while extensive micrographs, schematics of experimental setups, and graphs illustrate the discussion. Serving as a solid starting point for this rapidly evolving area, Heteroepitaxy of Semiconductors: Theory, Growth, and Characterization makes the principles of heteroepitaxy easily accessible to anyone preparing to enter the field.


Epitaxy of Semiconductors

Epitaxy of Semiconductors

Author: Udo W. Pohl

Publisher: Springer Nature

Published: 2020-07-20

Total Pages: 546

ISBN-13: 3030438694

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The extended and revised edition of this textbook provides essential information for a comprehensive upper-level graduate course on the crystalline growth of semiconductor heterostructures. Heteroepitaxy is the basis of today’s advanced electronic and optoelectronic devices, and it is considered one of the most important fields in materials research and nanotechnology. The book discusses the structural and electronic properties of strained epitaxial layers, the thermodynamics and kinetics of layer growth, and it describes the major growth techniques: metalorganic vapor-phase epitaxy, molecular-beam epitaxy, and liquid-phase epitaxy. It also examines in detail cubic and hexagonal semiconductors, strain relaxation by misfit dislocations, strain and confinement effects on electronic states, surface structures, and processes during nucleation and growth. Requiring only minimal knowledge of solid-state physics, it provides natural sciences, materials science and electrical engineering students and their lecturers elementary introductions to the theory and practice of epitaxial growth, supported by references and over 300 detailed illustrations. In this second edition, many topics have been extended and treated in more detail, e.g. in situ growth monitoring, application of surfactants, properties of dislocations and defects in organic crystals, and special growth techniques like vapor-liquid-solid growth of nanowires and selective-area epitaxy.


Chemical Vapor Deposition

Chemical Vapor Deposition

Author: Electrochemical Society. High Temperature Materials Division

Publisher: The Electrochemical Society

Published: 1997

Total Pages: 1686

ISBN-13: 9781566771788

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III-V Compound Semiconductors

III-V Compound Semiconductors

Author: Tingkai Li

Publisher: CRC Press

Published: 2016-04-19

Total Pages: 588

ISBN-13: 1439815232

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Silicon-based microelectronics has steadily improved in various performance-to-cost metrics. But after decades of processor scaling, fundamental limitations and considerable new challenges have emerged. The integration of compound semiconductors is the leading candidate to address many of these issues and to continue the relentless pursuit of more


Nondestructive Characterization of Materials XI

Nondestructive Characterization of Materials XI

Author: Robert E. Green

Publisher: Springer Science & Business Media

Published: 2003-06-18

Total Pages: 898

ISBN-13: 9783540401544

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The papers published in these proceedings represent the latest developments in Nondestructive Characterization of Materials and were presented at the Eleventh International Symposium on Nondestructive Characterization of Materials held in June 24-28, 2002 in Berlin, Germany.


New Research on Semiconductors

New Research on Semiconductors

Author: Thomas B. Elliot

Publisher: Nova Publishers

Published: 2006

Total Pages: 236

ISBN-13: 9781594549205

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Includes within its scope, topics such as: studies of the structural, electrical, optical and acoustical properties of bulk, low-dimensional and amorphous semiconductors; and, interface properties, including the physics and chemistry of heterojunctions, metal-semiconductor and insulator-semiconductor junctions.


Epioptics-9 - Proceedings Of The 39th Course Of The International School Of Solid State Physics

Epioptics-9 - Proceedings Of The 39th Course Of The International School Of Solid State Physics

Author: Antonio Cricenti

Publisher: World Scientific

Published: 2008-01-15

Total Pages: 191

ISBN-13: 9814471607

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This special volume contains the proceedings of the 9th Epioptics Workshop, held at the Ettore Majorana Foundation and Centre for Scientific Culture, Erice, Sicily, from July 20 to 26, 2006. The workshop was the 9th in the Epioptics series and the 39th of the International School of Solid State Physics.The workshop was aimed at assessing the capabilities of state-of-the-art optical techniques in elucidating the fundamental electronic and structural properties of semiconductor and metal surfaces, interfaces, thin layers, and layer structures, and at assessing the usefulness of these techniques for optimization of high-quality multilayer samples through feedback control during materials growth and processing. Particular emphasis is dedicated to the theory of non-linear optics and to dynamical processes through the use of pump-probe techniques together with the search for new optical sources. Some new applications of scanning probe microscopy to material science and biological samples, dried and in vivo, with the use of different laser sources are also presented.


Epioptics-9

Epioptics-9

Author: Antonio Cricenti

Publisher: World Scientific

Published: 2008

Total Pages: 191

ISBN-13: 9812794026

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This special volume contains the proceedings of the 9th Epioptics Workshop, held at the Ettore Majorana Foundation and Centre for Scientific Culture, Erice, Sicily, from July 20 to 26, 2006. The workshop was the 9th in the Epioptics series and the 39th of the International School of Solid State Physics.The workshop was aimed at assessing the capabilities of state-of-the-art optical techniques in elucidating the fundamental electronic and structural properties of semiconductor and metal surfaces, interfaces, thin layers, and layer structures, and at assessing the usefulness of these techniques for optimization of high-quality multilayer samples through feedback control during materials growth and processing. Particular emphasis is dedicated to the theory of non-linear optics and to dynamical processes through the use of pump-probe techniques together with the search for new optical sources. Some new applications of scanning probe microscopy to material science and biological samples, dried and in vivo, with the use of different laser sources are also presented.