National Semiconductor Metrology Program, Semiconductor Electronics Division, NIST List Of Publications, LP 103, March 1999
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Published: 1999
Total Pages: 148
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DOWNLOAD EBOOKRead and Download eBook Full
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Published: 1999
Total Pages: 148
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DOWNLOAD EBOOKAuthor: National Semiconductor Metrology Program (U.S.)
Publisher:
Published: 1999
Total Pages: 148
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DOWNLOAD EBOOKAuthor: National Institute of Standards and Technology (U.S.)
Publisher:
Published: 1999
Total Pages: 148
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DOWNLOAD EBOOKAuthor:
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Published: 2000
Total Pages: 160
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DOWNLOAD EBOOKAuthor: National Institute of Standards and Technology (U.S.)
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Published: 1994
Total Pages: 1162
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DOWNLOAD EBOOKAuthor: D. K. Harman
Publisher: DIANE Publishing
Published: 1995-10
Total Pages: 527
ISBN-13: 0788125214
DOWNLOAD EBOOKHeld in Gaithersburg, MD, Nov. 4-6, 1992. Evaluates new technologies in information retrieval. Numerous graphs, tables and charts.
Author: Barry N. Taylor
Publisher: DIANE Publishing
Published: 2009-11
Total Pages: 25
ISBN-13: 1437915566
DOWNLOAD EBOOKResults of measurements and conclusions derived from them constitute much of the technical information produced by the National Institute of Standards and Technology (NIST). In July 1992 the Director of NIST appointed an Ad Hoc Committee on Uncertainty Statements and charged it with recommending a policy on this important topic. The Committee concluded that the CIPM approach could be used to provide quantitative expression of measurement that would satisfy NIST¿s customers¿ requirements. NIST initially published a Technical Note on this issue in Jan. 1993. This 1994 edition addresses the most important questions raised by recipients concerning some of the points it addressed and some it did not. Illustrations.
Author: National Institute of Standards and Technology (U.S.)
Publisher:
Published: 1995
Total Pages: 146
ISBN-13:
DOWNLOAD EBOOKAuthor: James R. Ehrstein
Publisher:
Published: 1974
Total Pages: 300
ISBN-13:
DOWNLOAD EBOOKAuthor: D. Keith Bowen
Publisher: CRC Press
Published: 2018-10-03
Total Pages: 297
ISBN-13: 1420005650
DOWNLOAD EBOOKThe scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.