A variety of plasmas include molecules rather than only ions or atoms. Examples are ionospheres of the Earth and other planets, stellar atmospheres, gaseous discharges for use in various devices and processes, and fusion plasmas in the edge region. This book describes the role of molecules in those plasmas by showing elementary collision processes involving those molecules.
Atomic and molecular processes play an important role in laboratory and astrophysical plasmas for a wide range of conditions, and determine, in part, their electrical, transport, thermal, and radiation properties. The study of these and other plasma properties requires a knowledge of the cross sections, reaction rate coefficients, and inelastic energy transfers for a variety of collisional reactions. In this review, we provide quantitative information about the most important collision processes occurring in hy drogen, helium, and hydrogen-helium plasmas in the temperature range from 0. 1 eV to 20 keY. The material presented here is based on published atomic and molecular collision data, theoretical calculations, and appro priate extrapolation and interpolation procedures. This review gives the properties of each reaction, graphs of the cross sections and reaction rate coeffiCients, and the coefficients of analytical fits for these quantities. We present this information in a form that will enable researchers who are not experts in atomic physics to use the data easily. The authors thank their colleagues at the Princeton Plasma Physics Laboratory and in the atomic physics community who have made many useful suggestions for the selection and presentation o. f t. he material. We gratefully acknowledge the excellent technical assistance of Elizabeth Carey for the typing, and Bernie Giehl for the drafting. This work was supported in part by the U. S. Department of Energy Contract No. DE-AC02-76-CHO-3073. Princeton, USA R. K. Janev W. D. Langer September, 1987 K. Evans, Jr. , D. E.
Kinetic Processes in Gases and Plasmas provides a survey of studies on transport and chemical kinetic processes in high temperature gases and plasmas. The book is concerned with conditions produced by the interaction of an object with the atmosphere at hypersonic velocities. The text also provides a foundation for the flow field equations which include chemical reactions and other transport processes, and to present in some detail the microscopic considerations underlying these calculations. Chapters are devoted to the discussion of topics such as the molecular theory of transport equations; transport processes in ionized gases; and inelastic energy transfer processes and chemical kinetics. Aerospace engineers, physicists, chemists, and astrophysicists will find the book a good reference material.
This well-illustrated resource provides vital cross-section information for the atomic and molecular collision processes taking place in the boundary region of magnetically confined fusion plasmas and in other laboratory and astrophysical low-temperature plasmas. The expertly assessed information in this noteworthy volume includes the most recent experimental and theoretical results presented in a convenient format. Coverage includes the processes of electron-impact excitation and ionization of plasma edge atoms, electron-ion recombination, dissociative collision processes involving electrons and much more.
Emphasis is placed on the analysis of translational, rotational, vibrational and electronically excited state kinetics, coupled to the electron Boltzmann equation.
This volume deals with the basic knowledge and understanding of the fundamental interactions of low-energy electrons with molecules. Recent advances in electron-molecule interaction processes are discussed and a unique up-to-date and comprehensive account of the fundamental interactions of low-energy electrons with molecules of current interest in modern technology, specially the semiconductor industry, is presented. The material provided in this volume will aid scientists and engineers working in many fields of basic and applied science and engineering. The unique and authoritative knowledge, information, and understanding it provides generically underpins advances in plasma, laser, lighting, discharge, environmental, radiation, and other technologies.
Describing non-equilibrium "cold" plasmas through a chemical physics approach, this book uses the state-to-state plasma kinetics, which considers each internal state as a new species with its own cross sections. Extended atomic and molecular master equations are coupled with Boltzmann and Monte Carlo methods to solve the electron energy distribution function. Selected examples in different applied fields, such as microelectronics, fusion, and aerospace, are presented and discussed including the self-consistent kinetics in RF parallel plate reactors, the optimization of negative ion sources and the expansion of high enthalpy flows through nozzles of different geometries. The book will cover the main aspects of the state-to-state kinetic approach for the description of nonequilibrium cold plasmas, illustrating the more recent achievements in the development of kinetic models including the self-consistent coupling of master equations and Boltzmann equation for electron dynamics. To give a complete portrayal, the book will assess fundamental concepts and theoretical formulations, based on a unified methodological approach, and explore the insight in related scientific problems still opened for the research community.
Although based on lectures given for graduate students and postgraduates starting in plasma physics, this concise introduction to the fundamental processes and tools is as well directed at established researchers who are newcomers to spectroscopy and seek quick access to the diagnostics of plasmas ranging from low- to high-density technical systems at low temperatures, as well as from low- to high-density hot plasmas. Basic ideas and fundamental concepts are introduced as well as typical instrumentation from the X-ray to the infrared spectral regions. Examples, techniques and methods illustrate the possibilities. This book directly addresses the experimentalist who actually has to carry out the experiments and their interpretation. For that reason about half of the book is devoted to experimental problems, the instrumentation, components, detectors and calibration.
A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.