Micromechanical Photonics

Micromechanical Photonics

Author: Hiroo Ukita

Publisher: Springer Science & Business Media

Published: 2007-04-14

Total Pages: 259

ISBN-13: 3540313729

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This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics. It does this not only through theoretical and experimental results, but also by describing various products and their fields of application.


Microoptics and Nanooptics Fabrication

Microoptics and Nanooptics Fabrication

Author: Shanalyn Kemme

Publisher: CRC Press

Published: 2018-09-03

Total Pages: 232

ISBN-13: 1420019147

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The deep interconnection between micro/nanooptical components and related fabrication technologies—and the constant changes in this ever-evolving field—means that successful design depends on the engineer’s ability to accommodate cutting-edge theoretical developments in fabrication techniques and experimental realization. Documenting the state of the art in fabrication processes, Microoptics and Nanooptics Fabrication provides an up-to-date synopsis of recent breakthroughs in micro- and nanooptics that improve key developmental processes. This text elucidates the precise and miniaturized scale of today’s fabrication methods and their importance in creating new optical components to access the spectrum of physical optics. It details successful fabrication techniques and their direct effect on the intended performance of micro- and nanooptical components. The contributors explore the constraints related to material selection, component lateral extent, minimum feature size, and other issues that cause fabrication techniques to lag behind corresponding theory in the development process. Written with the professional optical engineer in mind, this book omits the already well-published broader processing fundamentals. Instead it focuses on key tricks of the trade helpful in reformulating processes to achieve necessary optical targets, improve process fidelity, and reduce production costs. The contributing authors represent the vanguard in micro-optical fabrication. The result of their combined efforts, this searing analysis of emerging fabrication technologies will continue to fuel the expansion of optics components, from the microwave to the infrared through the visible regime.


Microoptics

Microoptics

Author: Stefan Sinzinger

Publisher: John Wiley & Sons

Published: 2006-03-06

Total Pages: 447

ISBN-13: 3527606327

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Microoptics is an important enabling technology for many areas of application. In this updated second edition of their modern text and reference book, Stefan Sinzinger and Jürgen Jahns expertly and comprehensively present the basics and applications in microoptics, while incorporating the most important developments in recent years. An absolute must for physicists and electrical engineers, from advanced students right up to designers working in the field.


MEMS

MEMS

Author: Mohamed Gad-el-Hak

Publisher: CRC Press

Published: 2005-11-29

Total Pages: 678

ISBN-13: 1420036564

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Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.


Selected Papers on Optical MEMS

Selected Papers on Optical MEMS

Author: Victor M. Bright

Publisher: SPIE-International Society for Optical Engineering

Published: 1999

Total Pages: 654

ISBN-13:

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A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).