Micromechanical Photonics
Micromechanical Photonics

Author: Hiroo Ukita

Publisher: Springer Science & Business Media

Published: 2007-04-14

Total Pages: 259

ISBN-13: 3540313729

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This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics. It does this not only through theoretical and experimental results, but also by describing various products and their fields of application.

Microoptics
Microoptics

Author: Karl-Heinz Brenner

Publisher: Springer

Published: 2013-03-20

Total Pages: 325

ISBN-13: 0387347259

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Microoptics is still an emerging field with a huge potential for a large number of applications. This monograph brings together the most recent developments in order to give a broad overview.

Microoptics
Microoptics

Author: Stefan Sinzinger

Publisher: John Wiley & Sons

Published: 2006-03-06

Total Pages: 447

ISBN-13: 3527606327

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Microoptics is an important enabling technology for many areas of application. In this updated second edition of their modern text and reference book, Stefan Sinzinger and Jürgen Jahns expertly and comprehensively present the basics and applications in microoptics, while incorporating the most important developments in recent years. An absolute must for physicists and electrical engineers, from advanced students right up to designers working in the field.

Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators

Author: Gerhard Lammel

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 278

ISBN-13: 1475760833

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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.