The Materials Science of Thin Films

The Materials Science of Thin Films

Author: Milton Ohring

Publisher: Academic Press

Published: 1992

Total Pages: 744

ISBN-13: 9780125249904

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Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.


RLE Progress Report

RLE Progress Report

Author: Massachusetts Institute of Technology. Research Laboratory of Electronics

Publisher:

Published: 1990

Total Pages: 454

ISBN-13:

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Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings

Author: Peter M. Martin

Publisher: William Andrew

Published: 2009-12-01

Total Pages: 932

ISBN-13: 0815520328

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This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.


PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Author:

Publisher: Elsevier

Published: 1998-10-29

Total Pages: 434

ISBN-13: 0080542921

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Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems.In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films.This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.


Beam-Solid Interactions:: Volume 157

Beam-Solid Interactions:: Volume 157

Author: James A. Knapp

Publisher: Mrs Proceedings

Published: 1990-07-13

Total Pages: 912

ISBN-13:

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.