Microsensors, MEMS, and Smart Devices
Microsensors, MEMS, and Smart Devices

Author: Julian W. Gardner

Publisher: John Wiley & Sons

Published: 2001

Total Pages: 536

ISBN-13:

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Microsensors and MEMS (micro-electro-mechanical systems) are revolutionising the semiconductor industry. A microsystem or the so-called "system-on-a-chip" combines microelectronic circuitry with microsensors and microactuators. This emergent field has seen the development of applications ranging from the electronic nose and intelligent ear to micro-tweezers and the modern ink-jet nozzle. Providing a complete overview of microsensor technologies, this unique reference addresses vital integration issues for the successful application of microsensors, MEMS and smart devices. Features include: * Review of traditional and emerging fabrication processes including bulk and silicon micromachining, microstereolithography and polymer processing methods. * Focus on the use of IDT (interdigital transducer) microsensors in the development of low energy budget, wireless MEMS or micromachines. * Coverage of the katest applications in smart devices including the electronic nose, tongue and finger, along with smart sensors and strcutures such as smart skin. * An overview of the development of intelligent sensing devices through the use of sensor arrays, parametric compensation of sensor sugnals and ASIC technology. * Comprehensive appendices outlining vital MEMS material properties, relevant web sites and a guide to key institutions active in the field. Microsensors, MEMS and Smart Devices presents readers with the means to understand and evaluate microsystems. Advanced students and researchers in microelectronics, engineers and developers of microsensor systems will find this comprehensive treatment essential reading. Detailed coverage of material properties makes this an important reference work for mechnical engineers, physicists and material scientists working in the field.

Smart Material Systems and MEMS
Smart Material Systems and MEMS

Author: Vijay K. Varadan

Publisher: John Wiley & Sons

Published: 2006-11-02

Total Pages: 418

ISBN-13: 0470093625

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Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

Micro and Smart Devices and Systems
Micro and Smart Devices and Systems

Author: K. J. Vinoy

Publisher: Springer

Published: 2014-05-21

Total Pages: 509

ISBN-13: 8132219139

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The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Microsensors
Microsensors

Author: Julian W. Gardner

Publisher:

Published: 1994-09-06

Total Pages: 346

ISBN-13:

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Devoted primarily to the many applications of microsensors, this text covers thermal, radiation, mechanical, magnetic, chemical and biological microsensors. Information is also provided on basic processing, interfacing and bus systems, microsensor array and intelligent sensors.

Smart Mems And Sensor Systems
Smart Mems And Sensor Systems

Author: Elena Gaura

Publisher: World Scientific

Published: 2006-08-10

Total Pages: 553

ISBN-13: 178326053X

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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective.The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science.Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors.For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play. For the generalist (either in engineering or computing) or the technology manager the underpinning knowledge is provided, which can inform specialist decision making./a

Smart Mems and Sensor Systems
Smart Mems and Sensor Systems

Author: Elena Gaura

Publisher: Imperial College Press

Published: 2006

Total Pages: 553

ISBN-13: 1860949207

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In recent years, MEMS have revolutionized the semiconductor industry, with sensors being a particularly buoyant sector. Smart MEMS and Sensor Systems presents readers with the means to understand, evaluate, appreciate and participate in the development of the field, from a unique systems perspective. The combination of MEMS and integrated intelligence has been put forward as a disruptive technology. The full potential of this technology is only evident when it is used to construct very large pervasive sensing systems. The book explores the many different technologies needed to build such systems and integrates knowledge from three different domains: MEMS technology, sensor system electronics and pervasive computing science. Throughout the book a top-down design perspective is taken, be it for the development of a single smart sensor or that of adaptive ad-hoc networks of millions of sensors. For experts in any of the domains named above the book provides the context for their MEMS based design work and an understanding of the role the other domains play. For the generalist (either in engineering or computing) or the technology manager the underpinning knowledge is provided, which can inform specialist decision making. Sample Chapter(s). Chapter 1: Markets and Applications (1,731 KB). Contents: Markets and Applications; Microfabrication Technologies; Sensor Electronics; Sensor Signal Enhancement; Case Study: Control Systems for Capacitive Inertial Sensors; Case Study: Adaptive Optics and Smart VLSI/MEMS Systems; Artificial Intelligence Techniques for Microsensors Identification and Compensation; Smart, Intelligent and Cogent MEMS Based Sensors; Sensor Arrays and Networks; Wireless and Ad Hoc Sensor Networks; Realising the Dream OCo A Case Study. Readership: Graduate students on courses in sensing, instrumentation, VLSI, and MEMS technology; researchers and academics dealing with smart sensor systems; practitioners who need to understand and apply the technology effectively."

RF MEMS and Their Applications
RF MEMS and Their Applications

Author: Vijay K. Varadan

Publisher: John Wiley & Sons

Published: 2003-07-25

Total Pages: 406

ISBN-13: 0470846194

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Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

MEMS Mechanical Sensors
MEMS Mechanical Sensors

Author: Stephen Beeby

Publisher: Artech House

Published: 2004

Total Pages: 282

ISBN-13: 1580535364

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Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.

Microsensors
Microsensors

Author: Oleg Minin

Publisher: BoD – Books on Demand

Published: 2011-06-09

Total Pages: 310

ISBN-13: 9533071702

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This book is planned to publish with an objective to provide a state-of-art reference book in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors. This reference book is a collection of 13 chapters characterized in 4 parts: magnetic sensors, chemical, optical microsensors and applications. This book provides an overview of resonant magnetic field microsensors based on MEMS, optical microsensors, the main design and fabrication problems of miniature sensors of physical, chemical and biochemical microsensors, chemical microsensors with ordered nanostructures, surface-enhanced Raman scattering microsensors based on hybrid nanoparticles, etc. Several interesting applications area are also discusses in the book like MEMS gyroscopes for consumer and industrial applications, microsensors for non invasive imaging in experimental biology, a heat flux microsensor for direct measurements in plasma surface interactions and so on.