Microsystem Technology and Microrobotics
Microsystem Technology and Microrobotics

Author: Sergej Fatikow

Publisher: Springer Science & Business Media

Published: 2013-04-17

Total Pages: 420

ISBN-13: 3662034506

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Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Micro Mechanical Systems
Micro Mechanical Systems

Author: T. Fukuda

Publisher: Elsevier

Published: 1998-07-24

Total Pages: 278

ISBN-13: 0080536549

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In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.

Microrobotics
Microrobotics

Author: Yves Bellouard

Publisher: CRC Press

Published: 2009-11-04

Total Pages: 465

ISBN-13: 1439882983

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From conception to realization, Microrobotics: Methods and Applications covers all aspects of miniaturized systems that physically interact and manipulate objects at the microscale. It provides a solid understanding of this multidisciplinary field, which combines areas of materials science, mechanical engineering, and applied physics. Requiring no

Mems for Biomedical Applications
Mems for Biomedical Applications

Author: Shekhar Bhansali

Publisher: Elsevier

Published: 2012-07-18

Total Pages: 511

ISBN-13: 0857096273

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The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Neural Networks and Micromechanics
Neural Networks and Micromechanics

Author: Ernst Kussul

Publisher: Springer Science & Business Media

Published: 2009-12-01

Total Pages: 225

ISBN-13: 3642025358

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Micromechanical manufacturing based on microequipment creates new possibi- ties in goods production. If microequipment sizes are comparable to the sizes of the microdevices to be produced, it is possible to decrease the cost of production drastically. The main components of the production cost - material, energy, space consumption, equipment, and maintenance - decrease with the scaling down of equipment sizes. To obtain really inexpensive production, labor costs must be reduced to almost zero. For this purpose, fully automated microfactories will be developed. To create fully automated microfactories, we propose using arti?cial neural networks having different structures. The simplest perceptron-like neural network can be used at the lowest levels of microfactory control systems. Adaptive Critic Design, based on neural network models of the microfactory objects, can be used for manufacturing process optimization, while associative-projective neural n- works and networks like ART could be used for the highest levels of control systems. We have examined the performance of different neural networks in traditional image recognition tasks and in problems that appear in micromechanical manufacturing. We and our colleagues also have developed an approach to mic- equipment creation in the form of sequential generations. Each subsequent gene- tion must be of a smaller size than the previous ones and must be made by previous generations. Prototypes of ?rst-generation microequipment have been developed and assessed.

Microbiorobotics
Microbiorobotics

Author: Minjun Kim

Publisher: William Andrew

Published: 2012-03-08

Total Pages: 329

ISBN-13: 145577894X

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Microbiorobotics is a new engineering discipline that inherently involves a multidisciplinary approach (mechanical engineering, cellular biology, mathematical modeling, control systems, synthetic biology, etc). Building robotics system in the micro scale is an engineering task that has resulted in many important applications, ranging from micromanufacturing techniques to cellular manipulation. However, it is also a very challenging engineering task. One of the reasons is because many engineering ideas and principles that are used in larger scales do not scale well to the micro-scale. For example, locomotion principles in a fluid do not function in the same way, and the use of rotational motors is impractical because of the difficulty of building of the required components. Microrobotics is an area that is acknowledged to have massive potential in applications from medicine to manufacturing. This book introduces an inter-disciplinary readership to the toolkit that micro-organisms offer to micro-engineering The design of robots, sensors and actuators faces a range of techology challenges at the micro-scale. This book shows how biological techniques and materials can be used to meet these challenges World-class multi-disciplanry editors and contributors leverage insights from engineering, mathematical modeling and the life sciences – creating a novel toolkit for microrobotics

Mobile Microrobotics
Mobile Microrobotics

Author: Metin Sitti

Publisher: MIT Press

Published: 2017-06-16

Total Pages: 305

ISBN-13: 0262341018

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The first textbook on micron-scale mobile robotics, introducing the fundamentals of design, analysis, fabrication, and control, and drawing on case studies of existing approaches. Progress in micro- and nano-scale science and technology has created a demand for new microsystems for high-impact applications in healthcare, biotechnology, manufacturing, and mobile sensor networks. The new robotics field of microrobotics has emerged to extend our interactions and explorations to sub-millimeter scales. This is the first textbook on micron-scale mobile robotics, introducing the fundamentals of design, analysis, fabrication, and control, and drawing on case studies of existing approaches. The book covers the scaling laws that can be used to determine the dominant forces and effects at the micron scale; models forces acting on microrobots, including surface forces, friction, and viscous drag; and describes such possible microfabrication techniques as photo-lithography, bulk micromachining, and deep reactive ion etching. It presents on-board and remote sensing methods, noting that remote sensors are currently more feasible; studies possible on-board microactuators; discusses self-propulsion methods that use self-generated local gradients and fields or biological cells in liquid environments; and describes remote microrobot actuation methods for use in limited spaces such as inside the human body. It covers possible on-board powering methods, indispensable in future medical and other applications; locomotion methods for robots on surfaces, in liquids, in air, and on fluid-air interfaces; and the challenges of microrobot localization and control, in particular multi-robot control methods for magnetic microrobots. Finally, the book addresses current and future applications, including noninvasive medical diagnosis and treatment, environmental remediation, and scientific tools.

Microrobotics
Microrobotics

Author: Society of Photo-optical Instrumentation Engineers

Publisher: SPIE-International Society for Optical Engineering

Published: 1996

Total Pages: 228

ISBN-13:

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