Microelectronics Technology and Devices - SBMicro 2008
Author: Jacobus W. Swart
Publisher: The Electrochemical Society
Published: 2008-08
Total Pages: 679
ISBN-13: 1566776465
DOWNLOAD EBOOKThe SBMicro symposium is a forum dedicated to fabrication and modeling of microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators and MEMS. This issue of ECS Transactions contains the papers presented at the 2008 conference.