Microelectronics Technology and Devices--SBMICRO 2007
Author: João Antonio Martino
Publisher: The Electrochemical Society
Published: 2007
Total Pages: 615
ISBN-13: 1566775655
DOWNLOAD EBOOKThe SBMicro symposium is a forum dedicated to fabrication and modeling of Microsystems, integrated circuits and devices. The goal of the symposium is to bring together researchers in the areas of processing, materials, characterization, modeling and TCAD of integrated circuits, microsensors, microactuators, and MEMS. This issue contains the papers presented at the 2007 conference.