Sensors and Microsystems

Sensors and Microsystems

Author: C. Di Natale

Publisher: World Scientific

Published: 2004

Total Pages: 618

ISBN-13: 9789812702944

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This book constitutes a selection of papers presented at the 8th Italian Conference on Sensors and Microsystems. It contains contributions on sensors, microsystems, actuators and related interface electronics. Aspects of chemistry, biology and materials science are also covered. In addition, special sensor applications of industrial interest are presented and discussed. The proceedings have been selected for coverage in: . OCo Materials Science Citation Index-. OCo Index to Scientific & Technical Proceedings- (ISTP- / ISI Proceedings). OCo Index to Scientific & Technical Proceedings (ISTP CDROM version / ISI Proceedings). OCo CC Proceedings OCo Engineering & Physical Sciences."


Diffractive Optics and Optical Microsystems

Diffractive Optics and Optical Microsystems

Author: S. Martellucci

Publisher: Springer Science & Business Media

Published: 2013-06-29

Total Pages: 406

ISBN-13: 1489914749

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Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996


MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 2000

Total Pages: 544

ISBN-13: 9780819437167

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.


MEMS: A Practical Guide of Design, Analysis, and Applications

MEMS: A Practical Guide of Design, Analysis, and Applications

Author: Jan Korvink

Publisher: Springer Science & Business Media

Published: 2010-05-28

Total Pages: 981

ISBN-13: 3540336559

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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.


LIGA and its Applications

LIGA and its Applications

Author: Volker Saile

Publisher: John Wiley & Sons

Published: 2009-01-07

Total Pages: 491

ISBN-13: 3527316981

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Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.


Optical Imaging and Metrology

Optical Imaging and Metrology

Author: Wolfgang Osten

Publisher: John Wiley & Sons

Published: 2012-09-10

Total Pages: 471

ISBN-13: 3527648461

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A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.


Smart Sensors and MEMS

Smart Sensors and MEMS

Author: S Nihtianov

Publisher: Woodhead Publishing

Published: 2018-02-27

Total Pages: 606

ISBN-13: 0081020562

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Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications


Nanotribology

Nanotribology

Author: Stephen M. Hsu

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 442

ISBN-13: 1461510236

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Nanotribology: Critical Assessment and Research Needs is an excellent reference for both academic and industrial researchers working in the fields of nanotechnology, tribology, mechanical engineering, materials science and engineering, MEMS, NEMS, magnetic recording, and biomedical devices. It will also be of interest to those pursuing scanning probe microscopy, nanoimaging, mesomanufacturing, sensors, actuators, aerospace, defense (controllers, microsystems), and military systems. Nanotribology: Critical Assessment and Research Needs provides a critical assessment of the current state of the art of nanotribology within the context of MEMS, mesomanufacturing, nanotechnology and microsystems. It contains chapters written by the leading experts in these fields. It identifies gaps in current knowledge and barriers to applications, and recommends research areas that need to be addressed to enable the rapid development of technologies.