Microsystems are systems that integrate, on a chip or a package, one or more of many different categories of microdevices. As the past few decades were dominated by the development and rapid miniaturization of circuitry, the current and coming decades are witnessing a similar revolution in the miniaturization of sensors, actuators, and electronics; and communication, control and power devices. Applications ranging from biomedicine to warfare are driving rapid innovation and growth in the field, which is pushing this topic into graduate and undergraduate curricula in electrical, mechanical, and biomedical engineering.
The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.
Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
Special Features: · All the authors of this book are stalwarts in their respective field and are key people in promoting the technology and subject.· This book emphasizes analytical and computational modeling. · It includes in-depth discussion of mechanics, coupled multi-physics, electronics, control, and scaling effects as well as finite element analysis. · Relating all of the above to particular examples of microelectromechanical systems (MEMS) and smart devices is a highlight of this book. · Complementing the modeling aspects, the book includes organized summaries of a variety of devices and systems, details of packaging and integration, and case-studies of representative devices. · Prior disciplinary background is not assumed in presenting the material.· Many worked-out examples, context-relevant problems within the chapters, and practice exercises are included in all chapters. It is thus suitable for self-study by practicing engineers and researchers in many disciplines.· Unavailability of a book that covers both micro and smart systems at the fundamental level.· Excellent pedagogy with:" 230+ Illustrations" 25 Tables" 100+ Exercise Questions" 45 Your Turn questions for students wanting to invest time in researching." About 50 Problems and Examples within chapters About The Book: This book essentially deals with the basics of microsystem technology and is intended principally as a textbook at the undergraduate level; however, it can also be used as background book at the postgraduate level. The book makes an effort to provide an introduction to smart materials and systems. The aim of this book is to present adequate modeling details so that readers can appreciate the analysis involved in microsystems (and to some extent, smart systems) and thereby enabling them to get an in-depth understanding about simulation and design. Therefore, the book will also be useful to practicing researchers in all branches of science and engineering, who might be interested in applications where they can use this technology. The book presents adequate details of modeling of microsystems as well as addresses their fabrication and integration.
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications
This book-presents new methods and tools for the integration and simulation of smart devices. The design approach described in this book explicitly accounts for integration of Smart Systems components and subsystems as a specific constraint. It includes methodologies and EDA tools to enable multi-disciplinary and multi-scale modeling and design, simulation of multi-domain systems, subsystems and components at all levels of abstraction, system integration and exploration for optimization of functional and non-functional metrics. By covering theoretical and practical aspects of smart device design, this book targets people who are working and studying on hardware/software modelling, component integration and simulation under different positions (system integrators, designers, developers, researchers, teachers, students etc.). In particular, it is a good introduction to people who have interest in managing heterogeneous components in an efficient and effective way on different domains and different abstraction levels. People active in smart device development can understand both the current status of practice and future research directions. · Provides a comprehensive overview of smart systems design, focusing on design challenges and cutting-edge solutions; · Enables development of a co-simulation and co-design environment that accounts for the peculiarities of the basic subsystems and components to be integrated; · Describes development of modeling and design techniques, methods and tools that enable multi-domain simulation and optimization at various levels of abstraction and across different technological domains.
Smart Materials-Based Actuators at the Micro/Nano-Scale: Characterization, Control, and Applications gives a state of the art of emerging techniques to the characterization and control of actuators based on smart materials working at the micro/nano scale. The book aims to characterize some commonly used structures based on piezoelectric and electroactive polymeric actuators and also focuses on various and emerging techniques employed to control them. This book also includes two of the most emerging topics and applications: nanorobotics and cells micro/nano-manipulation.
In Optical Nano and Micro Actuator Technology, leading engineers, material scientists, chemists, physicists, laser scientists, and manufacturing specialists offer an in-depth, wide-ranging look at the fundamental and unique characteristics of light-driven optical actuators. They discuss how light can initiate physical movement and control a variety of mechanisms that perform mechanical work at the micro- and nanoscale. The book begins with the scientific background necessary for understanding light-driven systems, discussing the nature of light and the interaction between light and NEMS/MEMS devices. It then covers innovative optical actuator technologies that have been developed for many applications. The book examines photoresponsive materials that enable the design of optically driven structures and mechanisms and describes specific light-driven technologies that permit the manipulation of micro- and nanoscale objects. It also explores applications in optofluidics, bioMEMS and biophotonics, medical device design, and micromachine control. Inspiring the next generation of scientists and engineers to advance light-driven technologies, this book gives readers a solid grounding in this emerging interdisciplinary area. It thoroughly explains the scientific language and fundamental principles, provides a holistic view of optical nano and micro actuator systems, and illustrates current and potential applications of light-driven systems.
Nanosensors for Smart Agriculture covers new breakthroughs in smart agriculture, highlighting new technologies, such as the internet of things, big data and artificial intelligence. In addition, the book provides the many advantages of nanosensors over their micro counterparts, such as lower power consumption, higher sensitivity, lower concentration of analytes, and smaller interaction distances between the object and sensor. Sections provide information on fundamental design concepts and emerging applications of nanosensors in smart agriculture. The book highlights how, when cultivating soil, nanosensors and their wireless networks can be used for soil quality monitoring (moisture/herbicides/organic compound/trace metals monitoring in soil, etc. Other applications cover how smart nanosensors can be used for virus detection and hygiene/pathogen controls in livestocks, their use as active transport tracking devices for smart tracking and tracing, and other various applications, such as (i) nanochips for identity (radio frequency identification), (ii) food inspection, (iii) intelligent food packaging, and (iv) smart storage. This is an important reference source for materials scientists and agricultural engineers who are looking to understand more about how nanosensor technology can be used to create more efficient and sustainable agricultural systems. - Outlines the fabrication and fundamental design concepts of nanosensors for agricultural applications - Explains how nanosensors are being used throughout the agricultural cycle – from crop growth to food manufacturing - Assesses major challenges surrounding the application of nanosensors to agricultural applications in mass scale
This book addresses the need to understand the development, use, construction, and operation of smart microgrids (SMG). Covering selected major operations of SMG like dynamic energy management, demand response, and demand dispatch, it describes the design and operational challenges of different microgrids and provides feasible solutions for systems. Smart Micro Grid presents communication technologies and governing standards used in developing communication networks for realizing various smart services and applications in microgrids. An architecture facilitating bidirectional communication for smart distribution/microgrid is brought out covering aspects of its design, development and validation. The book is aimed at graduate, research students and professionals in power, power systems, and power electronics. Features: • Covers a broad overview of the benefits, the design and operation requirements, standards and communication requirements for deploying microgrids in distribution systems. • Explores issues related to planning, expansion, operation, type of microgrids, interaction among microgrid and distribution networks, demand response, and the technical requirements for the communication network. • Discusses current standards and common practices to develop and operate microgrids. • Describes technical issues and requirements for operating microgrids. • Illustrates smart communication architecture and protocols.
