MEMS Accelerometers
MEMS Accelerometers

Author: Mahmoud Rasras

Publisher: MDPI

Published: 2019-05-27

Total Pages: 252

ISBN-13: 3038974145

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Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Microelectromechanical Systems
Microelectromechanical Systems

Author: National Research Council

Publisher: National Academies Press

Published: 1998-01-01

Total Pages: 76

ISBN-13: 0309059801

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.

MEMS Silicon Oscillating Accelerometers and Readout Circuits
MEMS Silicon Oscillating Accelerometers and Readout Circuits

Author: Yong Ping Xu

Publisher: CRC Press

Published: 2022-09-01

Total Pages: 312

ISBN-13: 1000793737

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Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: Elsevier

Published: 2020-04-17

Total Pages: 1028

ISBN-13: 012817787X

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Inertial MEMS
Inertial MEMS

Author: Volker Kempe

Publisher: Cambridge University Press

Published: 2011-02-17

Total Pages: 497

ISBN-13: 1139494821

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A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

MEMS/NEMS Sensors
MEMS/NEMS Sensors

Author: Goutam Koley

Publisher: MDPI

Published: 2019-11-20

Total Pages: 242

ISBN-13: 3039216341

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Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

Recent Advances in Mechatronics
Recent Advances in Mechatronics

Author: Ryszard Jablonski

Publisher: Springer Science & Business Media

Published: 2007-09-19

Total Pages: 709

ISBN-13: 3540739564

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This book presents recent state of advances in mechatronics presented on the 7th International Conference Mechatronics 2007, hosted at the Faculty of Mechatronics, Warsaw University of Technology, Poland. The selected papers give an overview of the state-of-the-art and present new research results and prospects of the future development in this interdisciplinary field of mechatronic systems.

Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics
Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics

Author: Tarek Sobh

Publisher: Springer Science & Business Media

Published: 2008-08-15

Total Pages: 597

ISBN-13: 1402087373

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Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics includes a set of rigorously reviewed world-class manuscripts addressing and detailing state-of-the-art research projects in the areas of Industrial Electronics, Technology and Automation, Telecommunications and Networking. Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics includes selected papers form the conference proceedings of the International Conference on Industrial Electronics, Technology and Automation (IETA 2007) and International Conference on Telecommunications and Networking (TeNe 07) which were part of the International Joint Conferences on Computer, Information and Systems Sciences and Engineering (CISSE 2007).

Practical MEMS
Practical MEMS

Author: Ville Kaajakari

Publisher:

Published: 2009

Total Pages: 478

ISBN-13: 9780982299104

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Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.

Vibration Engineering and Technology of Machinery, Volume I
Vibration Engineering and Technology of Machinery, Volume I

Author: Rajiv Tiwari

Publisher: Springer Nature

Published: 2023-12-26

Total Pages: 602

ISBN-13: 9819947219

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This book presents the proceedings of the XVI International Conference on Vibration Engineering and Technology of Machinery (VETOMAC 2021). It gathers the latest advances, innovations, and applications in the field of vibration and technology of machinery. Topics include concepts and methods in dynamics, dynamics of mechanical and structural systems, dynamics and control, condition monitoring, machinery and structural dynamics, rotor dynamics, experimental techniques, finite element model updating, industrial case studies, vibration control and energy harvesting, and MEMS. The contributions, which were selected through a rigorous international peer-review process, share exciting ideas that will spur novel research directions and foster new multidisciplinary collaborations. The book is useful for the researchers, engineers and professionals working in the area of vibration engineering and technology of machinery.