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Author: Arturo A. Ayón
Publisher:
Published: 2002-05-23
Total Pages: 344
ISBN-13:
DOWNLOAD EBOOKThe MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Author: Shekhar Bhansali
Publisher: Elsevier
Published: 2012-07-18
Total Pages: 511
ISBN-13: 0857096273
DOWNLOAD EBOOKThe application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. - Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field - Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms - Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy
Author: Masayoshi Esashi
Publisher: John Wiley & Sons
Published: 2021-03-16
Total Pages: 528
ISBN-13: 3527823255
DOWNLOAD EBOOKExplore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Author: Henry Baltes
Publisher: John Wiley & Sons
Published: 2008-07-11
Total Pages: 612
ISBN-13: 3527616934
DOWNLOAD EBOOKMicrostructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
Author: Robert A. Dorey
Publisher: William Andrew
Published: 2011-10-21
Total Pages: 217
ISBN-13: 1437778178
DOWNLOAD EBOOKThe MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book
Author: Minhang Bao
Publisher: Elsevier
Published: 2005-04-12
Total Pages: 327
ISBN-13: 008045562X
DOWNLOAD EBOOKSensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field.* Presents the analysis and design principles of MEMS devices more systematically than ever before.* Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures* A problem section is included at the end of each chapter with answers provided at the end of the book.
Author: S. L. Kakani
Publisher: New Age International
Published: 2006-12
Total Pages: 20
ISBN-13: 8122415288
DOWNLOAD EBOOKThe Book Has Been Designed To Cover All Relevant Topics In B.E. (Mechanical/Metallurgy / Material Science / Production Engineering), M.Sc. (Material Science), B.Sc. (Honours), M.Sc. (Physics), M.Sc. (Chemistry), Amie And Diploma Students. Students Appearing For Gate, Upsc, Net, Slet And Other Entrance Examinations Will Also Find Book Quite Useful.In Nineteen Chapters, The Book Deals With Atomic Structure, The Structure Of Solids; Crystal Defects; Chemical Bonding; Diffusion In Solids; Mechanical Properties And Tests Of Materials; Alloys, Phase Diagrams And Phase Transformations; Heat Treatment; Deformation Of Materials; Oxidation And Corrosion; Electric, Magnetic, Thermal And Optical Properties; Semiconductors; Superconductivity; Organic Materials; Composites; And Nanostructured Materials.Special Features: * Fundamental Principles And Applications Are Discussed With Explanatory Diagrams In A Clear Way. * A Full Coverage Of Background Topics With Latest Development Is Provided. * Special Chapters On Nanostructured Materials, Superconductivity, Semiconductors, Polymers, Composites, Organic Materials Are Given . * Solved Problems, Review Questions, Problems, Short-Question Answers And Typical Objective Type Questions Alongwith Suggested Readings Are Given With Each Chapter.
Author: M.R. Islam
Publisher: Elsevier
Published: 2013-11-25
Total Pages: 480
ISBN-13: 0127999833
DOWNLOAD EBOOKThis is the first book in the petroleum sector that sheds light on the real obstacles to sustainable development and provides solutions to each problem encountered. Each solution is complete with an economic analysis that clarifies why petroleum operations can continue with even greater profit than before while ensuring that the negative environmental impact is diminished. The new screening tools and models proposed in this book will provide one with proper guidelines to achieve true sustainability in both technology development and management of the petroleum sector.
Author: Nadim Maluf
Publisher: Artech House
Published: 2004
Total Pages: 312
ISBN-13: 9781580535915
DOWNLOAD EBOOKBringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Author: Vijay K. Varadan
Publisher: John Wiley & Sons
Published: 2006-11-02
Total Pages: 418
ISBN-13: 0470093625
DOWNLOAD EBOOKPresenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.
