Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing

Author: Francis F. Chen

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 213

ISBN-13: 1461501814

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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.


Plasma Physics

Plasma Physics

Author: Andreas Dinklage

Publisher: Springer Science & Business Media

Published: 2005-06-09

Total Pages: 524

ISBN-13: 9783540252740

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Plasma Physics: Confinement, Transport and Collective Effects provides an overview of modern plasma research with special focus on confinement and related issues. Beginning with a broad introduction, the book leads graduate students and researchers – also those from related fields - to an understanding of the state-of-the-art in modern plasma physics. Furthermore, it presents a methodological cross section ranging from plasma applications and plasma diagnostics to numerical simulations, the latter providing an increasingly important link between theory and experiment. Effective references guide the reader from introductory texts through to contemporary research. Some related exercises in computational plasma physics are supplied on a special web site


Introduction to Plasma Physics and Controlled Fusion

Introduction to Plasma Physics and Controlled Fusion

Author: Francis F. Chen

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 427

ISBN-13: 1475755953

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TO THE SECOND EDITION In the nine years since this book was first written, rapid progress has been made scientifically in nuclear fusion, space physics, and nonlinear plasma theory. At the same time, the energy shortage on the one hand and the exploration of Jupiter and Saturn on the other have increased the national awareness of the important applications of plasma physics to energy production and to the understanding of our space environment. In magnetic confinement fusion, this period has seen the attainment 13 of a Lawson number nTE of 2 x 10 cm -3 sec in the Alcator tokamaks at MIT; neutral-beam heating of the PL T tokamak at Princeton to KTi = 6. 5 keV; increase of average ß to 3%-5% in tokamaks at Oak Ridge and General Atomic; and the stabilization of mirror-confined plasmas at Livermore, together with injection of ion current to near field-reversal conditions in the 2XIIß device. Invention of the tandem mirror has given magnetic confinement a new and exciting dimension. New ideas have emerged, such as the compact torus, surface-field devices, and the EßT mirror-torus hybrid, and some old ideas, such as the stellarator and the reversed-field pinch, have been revived. Radiofrequency heat ing has become a new star with its promise of dc current drive. Perhaps most importantly, great progress has been made in the understanding of the MHD behavior of toroidal plasmas: tearing modes, magnetic Vll Vlll islands, and disruptions.


Space Plasma Simulation

Space Plasma Simulation

Author: Jörg Büchner

Publisher: Springer Science & Business Media

Published: 2003-04-09

Total Pages: 363

ISBN-13: 3540006982

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The aim of this book is twofold: to provide an introduction for newcomers to state of the art computer simulation techniques in space plasma physics and an overview of current developments. Computer simulation has reached a stage where it can be a highly useful tool for guiding theory and for making predictions of space plasma phenomena, ranging from microscopic to global scales. The various articles are arranged, as much as possible, according to the - derlying simulation technique, starting with the technique that makes the least number of assumptions: a fully kinetic approach which solves the coupled set of Maxwell’s equations for the electromagnetic ?eld and the equations of motion for a very large number of charged particles (electrons and ions) in this ?eld. Clearly, this is also the computationally most demanding model. Therefore, even with present day high performance computers, it is the most restrictive in terms of the space and time domain and the range of particle parameters that can be covered by the simulation experiments. It still makes sense, therefore, to also use models, which due to their simp- fying assumptions, seem less realistic, although the e?ect of these assumptions on the outcome of the simulation experiments needs to be carefully assessed.


Introduction to Plasma Physics

Introduction to Plasma Physics

Author: Donald A. Gurnett

Publisher: Cambridge University Press

Published: 2017-02-20

Total Pages: 535

ISBN-13: 1107027373

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Introducing the principles and applications of plasma physics, this new edition is ideal as an advanced undergraduate or graduate-level text.


Lecture Notes in Physics- Introduction to Plasma Physics

Lecture Notes in Physics- Introduction to Plasma Physics

Author: Michael Gedalin

Publisher:

Published: 2014-09-27

Total Pages: 78

ISBN-13: 9781502522290

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Plasma is usually said to be a gas of charged particles. Taken as it is, this definition isnot especially useful and, in many cases, proves to be wrong. Yet, two basic necessary(but not sufficient) properties of the plasma are: a) presence of freely moving chargedparticles, and b) large number of these particles. Plasma does not have to consists ofcharged particles only, neutrals may be present as well, and their relative number wouldaffect the features of the system. For the time being, we, however, shall concentrate onthe charged component only


Introduction to Plasma Physics

Introduction to Plasma Physics

Author: R.J Goldston

Publisher: CRC Press

Published: 2020-07-14

Total Pages: 514

ISBN-13: 9781439822074

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Introduction to Plasma Physics is the standard text for an introductory lecture course on plasma physics. The text’s six sections lead readers systematically and comprehensively through the fundamentals of modern plasma physics. Sections on single-particle motion, plasmas as fluids, and collisional processes in plasmas lay the groundwork for a thorough understanding of the subject. The authors take care to place the material in its historical context for a rich understanding of the ideas presented. They also emphasize the importance of medical imaging in radiotherapy, providing a logical link to more advanced works in the area. The text includes problems, tables, and illustrations as well as a thorough index and a complete list of references.


The Physics of the Quark-Gluon Plasma

The Physics of the Quark-Gluon Plasma

Author: Sourav Sarkar

Publisher: Springer Science & Business Media

Published: 2009-12-16

Total Pages: 374

ISBN-13: 3642022855

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The aim of this book is to offer to the next generation of young researchers a broad and largely self-contained introduction to the physics of heavy ion collisions and the quark-gluon plasma, providing material beyond that normally found in the available textbooks. For each of the main aspects - QCD thermodynamics and global features of the QGP, collision hydrodynamics, electromagnetic probes, jet and quarkonium production, color glass condensate, and the gravity connection - the present volume provides extensive and pedagogical lectures, surveying the present status of both theory and experiment. A particular feature of this volume is that all lectures have been written with the active assistance of selected students present at the course in order to ensure the adequate level and coverage for the intended readership.


An Introduction to Plasma Physics and Its Space Applications, Volume 1

An Introduction to Plasma Physics and Its Space Applications, Volume 1

Author: Luis Conde

Publisher: Morgan & Claypool Publishers

Published: 2018-12-11

Total Pages: 130

ISBN-13: 1643271741

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The growing number of scientific and technological applications of plasma physics in the field of Aerospace Engineering requires that graduate students and professionals understand their principles. This introductory book is the expanded version of class notes of lectures I taught for several years to students of Aerospace Engineering and Physics. It is intended as a reading guide, addressed to students and non-specialists to tackle later with more advanced texts. To make the subject more accessible the book does not follow the usual organization of standard textbooks in this field and is divided in two parts. The first introduces the basic kinetic theory (molecular collisions, mean free path, etc.) of neutral gases in equilibrium in connection to the undergraduate physics courses. The basic properties of ionized gases and plasmas (Debye length, plasma frequencies, etc.) are addressed in relation to their equilibrium states and the collisional processes at the microscopic level. The physical description of short and long-range (Coulomb) collisions and the more relevant collisions (elementary processes) between electrons' ions and neutral atoms or molecules are discussed. The second part introduces the physical description of plasmas as a statistical system of interacting particles introducing advanced concepts of kinetic theory, (non-equilibrium distribution functions, Boltzmann collision operator, etc). The fluid transport equations for plasmas of electron ions and neutral atoms and the hydrodynamic models of interest in space science and plasma technology are derived. The plasma production in the laboratory in the context of the physics of electric breakdown is also discussed. Finally, among the myriad of aerospace applications of plasma physics, the low pressure microwave electron multipactor breakdown and plasma thrusters for space propulsion are presented in two separate chapters.


Physics of Dusty Plasmas

Physics of Dusty Plasmas

Author: André Melzer

Publisher: Springer

Published: 2019-06-13

Total Pages: 237

ISBN-13: 3030202607

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Colloidal plasmas - a still emerging field of plasma physics - enable the study of basic plasma properties on a microscopic kinetic level and allow the visualization of collective plasma phenomena, like oscillations and waves. Moreover, a vast number of novel phenomena are found in these systems, ranging from Coulomb crystallization to new types of forces and waves. Last but not least, they shed a new light on various traditional aspects of plasma physics such as shielding or the mechanism of acoustic waves in plasmas, thus providing new insight into the basic foundations of plasma physics.These course-based and self-contained lecture notes provide a general introduction to this active and growing field to students and nonspecialists, requiring only basic prior knowledge in plasma physics. ​