Rapid Thermal Processing
Rapid Thermal Processing

Author: Richard B. Fair

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 441

ISBN-13: 0323139809

DOWNLOAD EBOOK

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.

Handbook of Solid State Diffusion: Volume 1
Handbook of Solid State Diffusion: Volume 1

Author: Aloke Paul

Publisher: Elsevier

Published: 2017-04-11

Total Pages: 550

ISBN-13: 0128043601

DOWNLOAD EBOOK

Handbook of Solid State Diffusion, Volume 1: Diffusion Fundamentals and Techniques covers the basic fundamentals, techniques, applications, and latest developments in the area of solid-state diffusion, offering a pedagogical understanding for students, academicians, and development engineers. Both experimental techniques and computational methods find equal importance in the first of this two-volume set. Volume 1 covers the fundamentals and techniques of solid-state diffusion, beginning with a comprehensive discussion of defects, then different analyzing methods, and finally concluding with an exploration of the different types of modeling techniques. - Presents a handbook with a short mathematical background and detailed examples of concrete applications of the sophisticated methods of analysis - Enables readers to learn the basic concepts of experimental approaches and the computational methods involved in solid-state diffusion - Covers bulk, thin film, and nanomaterials - Introduces the problems and analysis in important materials systems in various applications - Collates contributions from academic and industrial problems from leading scientists involved in developing key concepts across the globe

Beam-Solid Interactions:: Volume 157
Beam-Solid Interactions:: Volume 157

Author: James A. Knapp

Publisher: Mrs Proceedings

Published: 1990-07-13

Total Pages: 912

ISBN-13:

DOWNLOAD EBOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Multifunctional Materials: Volume 175
Multifunctional Materials: Volume 175

Author: Alan Buckley

Publisher: Mrs Proceedings

Published: 1990-08-29

Total Pages: 420

ISBN-13:

DOWNLOAD EBOOK

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Computational Photonic Sensors
Computational Photonic Sensors

Author: Mohamed Farhat O. Hameed

Publisher: Springer

Published: 2018-06-13

Total Pages: 446

ISBN-13: 3319765566

DOWNLOAD EBOOK

This book provides a comprehensive overview of the photonic sensing field by covering plasmonics, photonic crystal, and SOI techniques from theory to real sensing applications. A literature review of ultra-sensitive photonic sensors, including their design and application in industry, makes this a self-contained and comprehensive resource for different types of sensors, with high value to the biosensor sector in particular. The book is organized into four parts: Part I covers the basic theory of wave propagation, basic principles of sensing, surface plasmon resonance, and silicon photonics; Part II details the computational modeling techniques for the analysis and prediction of photonic sensors; Part III and Part IV cover the various mechanisms and light matter interaction scenarios behind the design of photonic sensors including photonic crystal fiber sensors and SOI sensors. This book is appropriate for academics and researchers specializing in photonic sensors; graduate students in the early and intermediate stages working in the areas of photonics, sensors, biophysics, and biomedical engineering; and to biomedical, environmental, and chemical engineers.