MEMS Accelerometers
MEMS Accelerometers

Author: Mahmoud Rasras

Publisher: MDPI

Published: 2019-05-27

Total Pages: 252

ISBN-13: 3038974145

DOWNLOAD EBOOK

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

CMOS - MEMS
CMOS - MEMS

Author: Henry Baltes

Publisher: John Wiley & Sons

Published: 2013-03-26

Total Pages: 610

ISBN-13: 352767506X

DOWNLOAD EBOOK

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of MEMS is covered from all angles. The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS - a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first place, rather than having a hybrid solution.

ICGG 2022 - Proceedings of the 20th International Conference on Geometry and Graphics
ICGG 2022 - Proceedings of the 20th International Conference on Geometry and Graphics

Author: Liang-Yee Cheng

Publisher: Springer Nature

Published: 2022-08-12

Total Pages: 1080

ISBN-13: 3031135881

DOWNLOAD EBOOK

This book covers recent achievements on the ever-expanding field of Geometry and Graphics on both analogical and digital fronts, from theoretical investigations to a broad range of applications, new teaching methodologies, and historical aspects. It is from 20th International Conference on Geometry and Graphics (ICGG2022), a series of conference that started in 1978 and promoted by International Society for Geometry and Graphics, which aims to foster international collaboration and stimulate the scientific research and teaching innovations in the multidisciplinary field. The contents of the book are organized in: Theoretical Geometry and Graphics; Applied Geometry and Graphics; Engineering Computer Graphics; Graphics Education; Geometry and Graphics in History, and are intent for the academics, researchers, and professionals in architecture, engineering, industrial design, mathematics, and arts.

The Physics of Semiconductor Devices
The Physics of Semiconductor Devices

Author: R. K. Sharma

Publisher: Springer

Published: 2019-01-31

Total Pages: 1260

ISBN-13: 3319976044

DOWNLOAD EBOOK

This book disseminates the current knowledge of semiconductor physics and its applications across the scientific community. It is based on a biennial workshop that provides the participating research groups with a stimulating platform for interaction and collaboration with colleagues from the same scientific community. The book discusses the latest developments in the field of III-nitrides; materials & devices, compound semiconductors, VLSI technology, optoelectronics, sensors, photovoltaics, crystal growth, epitaxy and characterization, graphene and other 2D materials and organic semiconductors.

CMOS - MEMS
CMOS - MEMS

Author: Henry Baltes

Publisher: John Wiley & Sons

Published: 2008-07-11

Total Pages: 612

ISBN-13: 3527616934

DOWNLOAD EBOOK

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Biomechanical Microsystems
Biomechanical Microsystems

Author: Vytautas Ostasevicius

Publisher: Springer

Published: 2017-03-27

Total Pages: 289

ISBN-13: 3319548492

DOWNLOAD EBOOK

This book presents the most important aspects of analysis of dynamical processes taking place on the human body surface. It provides an overview of the major devices that act as a prevention measure to boost a person‘s motivation for physical activity. A short overview of the most popular MEMS sensors for biomedical applications is given. The development and validation of a multi-level computational model that combines mathematical models of an accelerometer and reduced human body surface tissue is presented. Subsequently, results of finite element analysis are used together with experimental data to evaluate rheological properties of not only human skin but skeletal joints as well. Methodology of development of MOEMS displacement-pressure sensor and adaptation for real-time biological information monitoring, namely “ex vivo” and “in vitro” blood pulse type analysis, is described. Fundamental and conciliatory investigations, achieved knowledge and scientific experience about biologically adaptive multifunctional nanocomposite materials, their properties and synthesis compatibility, periodical microstructures, which may be used in various optical components for modern, productive sensors‘ formation technologies and their application in medicine, pharmacy industries and environmental monitoring, are presented and analyzed. This book also is aimed at research and development of vibrational energy harvester, which would convert ambient kinetic energy into electrical energy by means of the impact-type piezoelectric transducer. The book proposes possible prototypes of devices for non-invasive real-time artery pulse measurements and micro energy harvesting.

Development of CMOS-MEMS/NEMS Devices
Development of CMOS-MEMS/NEMS Devices

Author: Jaume Verd

Publisher: MDPI

Published: 2019-06-25

Total Pages: 166

ISBN-13: 3039210688

DOWNLOAD EBOOK

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Handbook of Silicon Based MEMS Materials and Technologies
Handbook of Silicon Based MEMS Materials and Technologies

Author: Markku Tilli

Publisher: Elsevier

Published: 2020-04-17

Total Pages: 1028

ISBN-13: 012817787X

DOWNLOAD EBOOK

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors