Electron and Ion Optics
Electron and Ion Optics

Author: Miklos Szilagyi

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 550

ISBN-13: 1461309239

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The field of electron and ion optics is based on the analogy between geometrical light optics and the motion of charged particles in electromagnetic fields. The spectacular development of the electron microscope clearly shows the possibilities of image formation by charged particles of wavelength much shorter than that of visible light. As new applications such as particle accelerators, cathode ray tubes, mass and energy spectrometers, microwave tubes, scanning-type analytical instruments, heavy beam technologies, etc. emerged, the scope of particle beam optics has been exten ded to the formation of fine probes. The goal is to concentrate as many particles as possible in as small a volume as possible. Fabrication of microcircuits is a good example of the growing importance of this field. The current trend is towards increased circuit complexity and pattern density. Because of the diffraction limitation of processes using optical photons and the technological difficulties connected with x-ray processes, charged particle beams are becoming popular. With them it is possible to write directly on a wafer under computer control, without using a mask. Focused ion beams offer especially great possibilities in the submicron region. Therefore, electron and ion beam technologies will most probably playa very important role in the next twenty years or so.

Principles of Electron Optics
Principles of Electron Optics

Author: Peter W. Hawkes

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 755

ISBN-13: 0080984169

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The three volumes in the PRINCIPLES OF ELECTRON OPTICS Series constitute the first comprehensive treatment of electron optics in over forty years. While Volumes 1 and 2 are devoted to geometrical optics, Volume 3 is concerned with wave optics and effects due to wave length. Subjects covered include:Derivation of the laws of electron propagation from SchrUdinger's equationImage formation and the notion of resolutionThe interaction between specimens and electronsImage processingElectron holography and interferenceCoherence, brightness, and the spectral functionTogether, these works comprise a unique and informative treatment of the subject. Volume 3, like its predecessors, will provide readers with both a textbook and an invaluable reference source.

Aberration Theory in Electron and Ion Optics
Aberration Theory in Electron and Ion Optics

Author: Peter W. Hawkes

Publisher: Elsevier

Published: 2023-06-02

Total Pages: 376

ISBN-13: 0443193215

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Advances in Imaging and Electron Physics, Volume 227 in the Advances in Imaging and Electron Physics series, merges two long-running serials, Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. The series features articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science, digital image processing, electromagnetic wave propagation, electron microscopy and the computing methods used in all these domains. - Provides the authority and expertise of leading contributors from an international board of authors - Presents the latest release in the Advances in Imaging and Electron Physics series

Applied Charged Particle Optics
Applied Charged Particle Optics

Author: Helmut Liebl

Publisher: Springer Science & Business Media

Published: 2008-01-12

Total Pages: 131

ISBN-13: 3540719253

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Written by a pioneer in the field, this overview of charged particle optics provides a solid introduction to the subject area for all physicists wishing to design their own apparatus or better understand the instruments with which they work. It begins by introducing electrostatic lenses and fields used for acceleration, focusing and deflection of ions or electrons. Subsequent chapters give detailed descriptions of electrostatic deflection elements, uniform and non-uniform magnetic sector fields, image aberrations, and, finally, fringe field confinement.

Focusing of Charged Particles V2
Focusing of Charged Particles V2

Author: Albert Septier

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 487

ISBN-13: 0323148468

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Focusing of Charged Particles, Volume II presents the aspects of particle optics, including the electron, the ion optical domains, and the accelerator field. This book provides a detailed analysis of the principles of the laws of propagation of beams. Comprised of three parts encompassing three chapters, this volume starts with an overview of how a beam of charged particles traverses a region that is at a uniform, constant, electrostatic potential. This book then discusses the principle of charge repulsion effect by which the space charge of the beam modifies the potential in the region that it traverses. Other chapters examine the general design techniques and performances obtainable for electron guns applicable for use in initiating a beam for linear beam tubes that is given in a condensed form. The last chapter deals with the two stable charged particles that can be accelerated, namely, protons and electrons. This book is a valuable resource to physicists, accelerator experts, and experimenters in search of interactions in the detector target.

Handbook of Charged Particle Optics
Handbook of Charged Particle Optics

Author: Jon Orloff

Publisher: CRC Press

Published: 2017-12-19

Total Pages: 938

ISBN-13: 1351835777

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With the growing proliferation of nanotechnologies, powerful imaging technologies are being developed to operate at the sub-nanometer scale. The newest edition of a bestseller, the Handbook of Charged Particle Optics, Second Edition provides essential background information for the design and operation of high resolution focused probe instruments. The book’s unique approach covers both the theoretical and practical knowledge of high resolution probe forming instruments. The second edition features new chapters on aberration correction and applications of gas phase field ionization sources. With the inclusion of additional references to past and present work in the field, this second edition offers perfectly calibrated coverage of the field’s cutting-edge technologies with added insight into how they work. Written by the leading research scientists, the second edition of the Handbook of Charged Particle Optics is a complete guide to understanding, designing, and using high resolution probe instrumentation.

High Resolution Focused Ion Beams: FIB and its Applications
High Resolution Focused Ion Beams: FIB and its Applications

Author: Jon Orloff

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 304

ISBN-13: 1461507650

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In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject.

Geometrical Charged-Particle Optics
Geometrical Charged-Particle Optics

Author: Harald H. Rose

Publisher: Springer Science & Business Media

Published: 2009

Total Pages: 422

ISBN-13: 3540859152

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This resource covering all theoretical aspects of modern geometrical charged-particle optics is aimed at anyone involved in the design of electron optical instruments and beam-guiding systems for charged particles.

Optics of Charged Particles
Optics of Charged Particles

Author: Hermann Wollnik

Publisher: Academic Press

Published: 2021-10-23

Total Pages: 319

ISBN-13: 012821466X

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Optics of Charged Particles, 2nd edition, describes how charged particles move in the fields of magnetic and electrostatic dipoles, quadrupoles, higher order multipoles, and field-free regions. Since the first edition, published over 30 years ago, new technologies have emerged and have been used for new ion optical instruments like, for instance, time-of-flight mass analyzers, which are described now. Fully updated and revised, this new edition provides ways to design mass separators, spectrographs, and spectrometers, which are the key tools in organic chemistry and for drug developments, in environmental trace analyses and for investigations in nuclear physics like the search for super heavy elements as well as molecules in space science. The book discusses individual particle trajectories as well as particle beams in space and in phase-space, and it provides guidelines for the design of particle optical instruments. For experienced researchers, working in the field, it highlights the latest developments in new ion optical instruments and provides guidelines and examples for the design of new instruments for the transport of beams of charged particles and the mass/charge or energy/charge analyses of ions. Furthermore, it provides background knowledge required to accurately understand and analyze results, when developing ion-optical instruments. By providing a comprehensive overview of the field of charged particle optics, this edition of the book supports all those working, directly or indirectly, with charged-particle research or the development of ion- and electron-analyzing instruments. Provides enhanced, clear descriptions, and derivations making complex aspects of the general motion of charged particles understandable as well as features of charged particle analyzing instruments Assists the reader in applying insights obtained from the principles of charged particle optics to the design of new transporting and mass- or energy-analyzing instruments for ions Discusses new applications and newly occurring issues, which have arisen since the first edition