Semiconductor Characterization
Semiconductor Characterization

Author: W. Murray Bullis

Publisher: American Institute of Physics

Published: 1996

Total Pages: 760

ISBN-13:

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Market: Those in government, industry, and academia interested in state-of-the-art knowledge on semiconductor characterization for research, development, and manufacturing. Based on papers given at an International Nist Workshop in January 1995, Semiconductor Characterization covers the unique characterization requirements of both silicon IC development and manufacturing, and compound semiconductor materials, devices, and manufacturing. Additional sections discuss technology trends and future requirements for compound semiconductor applications. Also highlighted are recent developments in characterization, including in- situ, in-FAB, and off-line analysis methods. The book provides a concise, effective portrayal of industry needs and problems in the important specialty of metrology for semiconductor technology.

Novel Forms of Carbon II: Volume 349
Novel Forms of Carbon II: Volume 349

Author: C. L. Renschler

Publisher:

Published: 1994-11-21

Total Pages: 584

ISBN-13:

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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes

Author: Bernd O. Kolbesen

Publisher: The Electrochemical Society

Published: 2003

Total Pages: 572

ISBN-13: 9781566773485

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.".. ALTECH 2003 was Symposium J1 held at the 203rd Meeting of the Electrochemical Society in Paris, France from April 27 to May 2, 2003 ... Symposium M1, Diagnostic Techniques for Semiconductor Materials and Devices, was part of the 202nd Meeting of the Electrochemical Society held in Salt Lake City, Utah, from October 21 to 25, 2002 ..."--p. iii.