Design, Test, and Microfabrication of MEMS and MOEMS
Author:
Publisher:
Published: 1999
Total Pages: 648
ISBN-13:
DOWNLOAD EBOOKPosts
MOEMS
Author: M. Edward Motamedi
Publisher: SPIE Press
Published: 2005
Total Pages: 640
ISBN-13: 9780819450210
DOWNLOAD EBOOKThis book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
Fundamentals of Microfabrication
Author: Marc J. Madou
Publisher: CRC Press
Published: 2018-10-08
Total Pages: 764
ISBN-13: 1482274000
DOWNLOAD EBOOKMEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Modeling MEMS and NEMS
Author: John A. Pelesko
Publisher: CRC Press
Published: 2002-11-25
Total Pages: 382
ISBN-13: 1420035290
DOWNLOAD EBOOKDesigning small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o
Micromachining and Microfabrication Process Technology
Author:
Publisher:
Published: 2003
Total Pages: 632
ISBN-13:
DOWNLOAD EBOOKFundamentals of Microfabrication and Nanotechnology, Three-Volume Set
Author: Marc J. Madou
Publisher: CRC Press
Published: 2018-12-14
Total Pages: 3654
ISBN-13: 1351990616
DOWNLOAD EBOOKNow in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
System-level Modeling of MEMS
Author: Oliver Brand
Publisher: John Wiley & Sons
Published: 2012-12-20
Total Pages: 562
ISBN-13: 3527647120
DOWNLOAD EBOOKSystem-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.
Structural Dynamics and Renewable Energy, Volume 1
Author: Tom Proulx
Publisher: Springer Science & Business Media
Published: 2011-06-21
Total Pages: 378
ISBN-13: 1441997164
DOWNLOAD EBOOKThe Collection embraces Structural Dynamics and Renewable Energy into more than 50 categories, including Shock and Vibration, Damping in Solids, Nonlinear Modeling, Structural Health Modeling, Structural Dynamics, and Rotating Machinery. This the first volume of the five-volume set brings together 34 chapters on Structural Dynamics and Renewable Energy.
Micromanufacturing and Nanotechnology
Author: Nitaigour P. Mahalik
Publisher: Springer Science & Business Media
Published: 2006-01-16
Total Pages: 478
ISBN-13: 3540293396
DOWNLOAD EBOOKMicromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Stereolithography
Author: Paulo Jorge Bártolo
Publisher: Springer Science & Business Media
Published: 2011-03-18
Total Pages: 345
ISBN-13: 0387929045
DOWNLOAD EBOOKStereolithography: Materials, Processes and Applications will focus on recent advances in stereolithography covering aspects related to the most recent advances in the field, in terms of fabrication processes (two-photon polymerization, micro-stereolithography, infrared stereolithography and stereo-thermal-lithography), materials (novel resins, hydrogels for medical applications and highly reinforced resins with ceramics and metals), computer simulation and applications.
